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A method for preparing a large-size rotating ceramic target

A ceramic target and large-size technology, which is applied in the field of large-size rotary ceramic target preparation, can solve problems such as excessive deviation of target straightness, different temperature and pressure resistance of the furnace bottom, and excessive deviation of target density.

Active Publication Date: 2022-04-29
河北恒博新材料科技股份有限公司
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Problems solved by technology

The shorter rotating target is sintered with the axis perpendicular to the horizontal plane. After its length increases to a certain value, because its own weight is too large, it will appear that the upper, lower, and lower diameters shrink inconsistently due to the friction with the setter. The bell mouth phenomenon and the ellipse phenomenon appearing on the cross section. At the same time, the excessive temperature difference between the upper and lower sides of the furnace body will also cause the density deviation of the target to exceed the standard. In addition, the temperature and pressure resistance of the furnace bottom is caused by the density deviation. Different, so different degrees of deformation under high temperature and heavy pressure make the center of gravity of the target tilt, so that the straightness deviation of the target in the length direction is too large

Method used

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Embodiment Construction

[0027] Attached below figure 1 And embodiment the present invention is described in further detail:

[0028] A method for preparing a large-size rotating ceramic target, figure 1 It is a schematic diagram of the method, mainly a schematic diagram of the internal structure of the sintering furnace and the sintering furnace; it specifically includes the following steps:

[0029] 1) To make the green body of the target material, the raw material of the green body of the target material is selected to be spherical particles that are sprayed and granulated with a sufficient amount of binder to ensure the uniformity and strength of the green body during molding;

[0030] 2) Forming mold, using the structure of inner cylinder steel core and outer cylinder rubber sleeve;

[0031] 3) The target body is degreased, and the target body is placed in a pre-sintering furnace in a vertical position, and the degreasing temperature is maintained at 600 degrees Celsius for 10 hours;

[0032] ...

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Abstract

The invention discloses a method for preparing a large-size rotating ceramic target, which belongs to the technical field of target preparation and includes the following steps: 1) making a target body, 2) forming a mold, 3) degreasing the target body, and 4) pre-sintering Target blank, 5) Sintered target. The method for preparing a large-size rotating ceramic target material provided by the invention improves the yield of the target material, reduces the scrap rate of raw materials, and reduces the production cost.

Description

technical field [0001] The invention belongs to the technical field of target material preparation, and in particular relates to a method for preparing a large-size rotating ceramic target material. Background technique [0002] Magnetron sputtering of ITO conductive transparent film is an indispensable and important process in the field of flat panel displays. The 30-35% of the target is increased to 80%. Due to the limitations of the process and production conditions, it is impossible to prepare a super-long target that can be used directly in a single segment. Instead, it is assembled with multiple segments of 200-600 mm. It is generally believed in the industry that the gap between the segments of the rotating target The quality of the transparent conductive film has an important influence. In order to further improve the coating quality of the rotating target, it is required to reduce the number of joints, which requires increasing the length of a single target. The s...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C04B35/622C04B35/64
CPCC04B35/622C04B35/64C04B2235/61C04B2235/6562
Inventor 李庆丰骆树立王建堂骆如河骆胜华骆胜磊骆利军王壮伟骆胜凯骆胜喜
Owner 河北恒博新材料科技股份有限公司
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