Vacuum system and method for obtaining ultrahigh vacuum
A technology of ultra-high vacuum and vacuum system, which is applied in the field of vacuum system for obtaining ultra-high vacuum, can solve the problem of insufficient vacuum degree of ultra-high vacuum system, and achieve the effect of improving the experimental effect.
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[0020] Vacuum system for obtaining ultra-high vacuum, including vacuum chamber 1, titanium sublimation pump 2, angle valve 3, turbomolecular pump 4, ion gauge 5, inflation valve 6, nitrogen source, sputtering ion pump 7, tee tube 8 ;
[0021] Wherein, the vacuum chamber 1 is a cylindrical structure; the center of the top wall of the vacuum chamber 1 is provided with a vacuum interface, and the vacuum interface is connected with the titanium sublimation pump 2; the upper part of the side wall of the vacuum chamber 1 is provided with a vacuum interface, The vacuum interface communicates with the turbomolecular pump 4 through the angle valve 3; the upper side wall of the vacuum chamber 1 is also provided with a measurement interface, which communicates with the ion gauge 5; the middle part of the side wall of the vacuum chamber 1 is provided with an inflation interface , the charging interface communicates with the nitrogen source through the charging valve 6; the lower part of t...
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