Control method and control apparatus of linear motor stage

A linear motor and control device technology, applied in the direction of AC motor control, electric controller, controller with specific characteristics, etc., can solve problems such as difficult to achieve, achieve high-precision and high-speed positioning, easy adjustment, and realization of the design process Effect

Pending Publication Date: 2020-06-23
株式会社博迈立铖
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] PID control, which is relatively simple in design and adjustment, and easy to operate, has been widely used in precision mechanisms, but it has been difficult to achieve strict performance requirements in recent years, so a control method that can achieve high performance while maintaining convenience is sought

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  • Control method and control apparatus of linear motor stage
  • Control method and control apparatus of linear motor stage
  • Control method and control apparatus of linear motor stage

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Embodiment Construction

[0036] Hereinafter, the present invention will be described in detail based on drawings showing its embodiments.

[0037] First, a brief description will be given of the NCTF control system which is the feedback control system which is the basis of the present invention. figure 1 is a block diagram showing the general structure of the NCTF system.

[0038] For the NCTF control system, it is composed of a nominal characteristic trajectory (Nominal CharacteristicTrajectory: NCT) and a PI compensator. The nominal characteristic trajectory is formed according to the desired attenuation characteristics on the phase plane. The movement of the control object (mechanical equipment) is constrained to the NCT, and stops at the origin on the phase plane. NCT is made by simple open-loop experiments, and the optimal value of the gain of the PI compensator is determined through step response and trajectory control experiments. Therefore, the NCTF control system does not require detailed m...

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Abstract

The invention provides a control method and a control device for a linear motor stage based on the NCTF control method, which are easy in process and controller adjustment without special knowledge about control theory, and can be positioned with high precision and high speed. When positioning on a linear motor stage with a movable worktable on the plate, the NCTF control using the nominal characteristic trajectory allows the worktable to follow the vibration from the plate and suppresses high-frequency vibration generated in a process of allowing the worktable to follow the vibration of the plate. The nominal characteristic trajectory is obtained from an open-loop experiment using the input signal to the linear motor stage. Feedforward control is added to NCTF control. The target is control that suppresses the influence of the stage on relative movement of the plate with respect to the worktable due to the vibration of the plate.

Description

[0001] technology area [0002] The present invention relates to methods and apparatus for controlling the position of a linear motor platform. Background technique [0003] Linear motor platforms used in industrial equipment such as machine tools, measuring instruments, and semiconductor manufacturing equipment play an important role in the field. Since the motion accuracy of this linear motor stage greatly affects the quality and characteristics of products, the demand for high-precision and high-speed positioning is increasing. [0004] Traditionally, PID control, which is relatively simple in design and adjustment, and easy to operate, has been widely used in precision mechanisms. However, in recent years, it has been difficult to achieve strict performance requirements. Therefore, a control method that can achieve high performance while maintaining convenience is sought. Contents of the invention [0005] In the case where high-precision positioning is required, althou...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G05B11/42
CPCG05B11/42H02P25/06
Inventor 佐藤海二赤松薫
Owner 株式会社博迈立铖
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