Double-table-board exposure machine and method for controlling opening and closing of door of double-table-board exposure machine
An exposure machine and a double-table technology are applied in the direction of photomechanical equipment, microlithography exposure equipment, and photoplate making process on patterned surfaces. It can solve problems such as insufficient door closing, high environmental requirements, and poor exposure. Precisely set the gate position, improve the exposure quality, and avoid the effect of poor exposure
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[0024] Embodiments of the present invention are described in detail below, and the embodiments described with reference to the drawings are exemplary, and embodiments of the present invention are described in detail below.
[0025] Refer below Figure 1-Figure 2 A dual-stage exposure machine according to an embodiment of the first aspect of the present invention will be described.
[0026] Such as figure 1 As shown, the double-stage exposure machine 1 of the embodiment of the present invention includes a machine body 2 , a first door body 3 , a second door body 4 , an electric actuator 5 and a control device 6 .
[0027] Wherein, an exposure chamber can be arranged on the body 2, and a first table 7 and a second table 8 are arranged in the exposure chamber, and PCB boards to be exposed can be placed on the table.
[0028] The first door body 3 is positioned on the first table top 7 and has a gap with the first table top 7, and the second door body 4 is positioned on the seco...
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