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Double-table-board exposure machine and method for controlling opening and closing of door of double-table-board exposure machine

An exposure machine and a double-table technology are applied in the direction of photomechanical equipment, microlithography exposure equipment, and photoplate making process on patterned surfaces. It can solve problems such as insufficient door closing, high environmental requirements, and poor exposure. Precisely set the gate position, improve the exposure quality, and avoid the effect of poor exposure

Inactive Publication Date: 2020-06-19
HEFEI CHIP FOUND MICROELECTRONICS EQUIP CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] However, the PCB process has high requirements on the environment. If the PCB surface is contaminated with dust during exposure, it will cause poor exposure.
And, if the pneumatic door is used to control the opening and closing of the door, the door may not be able to open properly when the air source is insufficient. If the air source is too large, the speed will be too high to cause impact, and the pneumatic door cannot be positioned with high precision, which may cause the door to close. If it is not in place, it will cause pollution to the PCB board during the exposure process

Method used

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  • Double-table-board exposure machine and method for controlling opening and closing of door of double-table-board exposure machine
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  • Double-table-board exposure machine and method for controlling opening and closing of door of double-table-board exposure machine

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Embodiment Construction

[0024] Embodiments of the present invention are described in detail below, and the embodiments described with reference to the drawings are exemplary, and embodiments of the present invention are described in detail below.

[0025] Refer below Figure 1-Figure 2 A dual-stage exposure machine according to an embodiment of the first aspect of the present invention will be described.

[0026] Such as figure 1 As shown, the double-stage exposure machine 1 of the embodiment of the present invention includes a machine body 2 , a first door body 3 , a second door body 4 , an electric actuator 5 and a control device 6 .

[0027] Wherein, an exposure chamber can be arranged on the body 2, and a first table 7 and a second table 8 are arranged in the exposure chamber, and PCB boards to be exposed can be placed on the table.

[0028] The first door body 3 is positioned on the first table top 7 and has a gap with the first table top 7, and the second door body 4 is positioned on the seco...

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PUM

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Abstract

The invention provides a double-table-board exposure machine and a method for controlling the opening and closing of the double-table-board exposure machine, the double-table-board exposure machine comprises a machine body which comprises a first table board and a second table board, a first door body and a second door body, an electric executing device which is arranged on the machine body, is mechanically connected with the first door body and the second door body and is used for controlling the first door body to move in the direction parallel to the table board according to a first door body driving signal, and a control device which is electrically connected with the electric executing device and used for outputting the first door body driving signal or a second door body driving signal according to an operation instruction, wherein the first door body is located on the first table board, a gap is formed between the first door body and the first table board, the second door body is located on the second table board, a gap is formed between the second door body and the second table board, and the first door body and the second door body are staggered in the direction perpendicular to the table boards. According to the double-table-board exposure machine, external dust can be prevented from entering the table boards, and poor exposure is avoided.

Description

technical field [0001] The invention relates to the technical field of exposure equipment, in particular to a double-table exposure machine and a method for controlling the door opening and closing of the double-table exposure machine. Background technique [0002] The direct writing exposure of PCB (Printed Circuit Board, printed circuit board) has high requirements on the production capacity of the machine, so the double table exposure machine came into being. The double table laser direct writing exposure machine has two double tables, which can make one table in the At the same time as the direct writing exposure, the other table is pre-aligned in advance to increase the productivity of the machine. And, many exposure machines use pneumatic doors to control the opening and closing of the doors, and use compressed air to drive the door movement. On the one hand, it is necessary to have an air source on site, and on the other hand, the speed of the door is controlled by th...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G03F7/20
CPCG03F7/20G03F7/70808G03F7/70991
Inventor 张浩为
Owner HEFEI CHIP FOUND MICROELECTRONICS EQUIP CO LTD
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