A macro-micro compound constant pressure polishing device and method
A polishing device and polishing head technology, applied in the field of optical polishing, can solve the problems of large pressure control range, large polishing pressure, error, etc., and achieve the effect of high polishing precision
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[0023] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings.
[0024] Such as figure 1 As shown, the present invention provides an implementation case of a macro-micro compound constant pressure polishing device and method, which includes an adjustment weight 1, a force applying lever 2, a force transmission lever 3, an air flotation guide block 4, a pressure sensor 5, a mold Jen 6, permanent magnet 7, magnetic device 8, left and right moving table 9, up and down lifting table 10, up and down lead screw 11, pressure controller 12, polishing head 13, air bearing guide rail 14, left and right lead screw 15, rotating shaft 16, adjustment The weight 1 is connected with the force applying lever 2, the force applying lever 2 is connected with the force transmission lever 3, the force transmission lever 3 is connected with the air f...
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