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A kind of preparation method of zero power consumption pressure sensor

A pressure sensor, zero power consumption technology, applied in the direction of measuring fluid pressure, measuring fluid pressure through electromagnetic components, instruments, etc., can solve the problems of narrow detection range, low sensitivity, incompatibility, etc., to achieve improved measurement range, high sensitivity, The effect of large deformation

Active Publication Date: 2021-10-22
苏州慧闻纳米科技有限公司
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Problems solved by technology

However, zero-power pressure sensors based on piezoelectric materials often have the disadvantage of low sensitivity, and most piezoelectric materials are not compatible with existing industrial processes. Zero-power pressure sensors with triboelectric nanogenerators prepared by existing technologies , can be constructed from any material, and is compatible with existing industrial production lines, but has a narrow detection range, which severely limits its practical application

Method used

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  • A kind of preparation method of zero power consumption pressure sensor
  • A kind of preparation method of zero power consumption pressure sensor
  • A kind of preparation method of zero power consumption pressure sensor

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Embodiment Construction

[0041] The terms "first", "second" and the like in the specification and claims of the present application and the above drawings are used to distinguish similar objects, and are not necessarily used to describe a specific sequence or sequence. It is to be understood that the data so used are interchangeable under appropriate circumstances such that the embodiments of the application described herein can be practiced in sequences other than those illustrated or described herein.

[0042] figure 1 A schematic flowchart of a method for manufacturing a zero-power consumption pressure sensor according to an embodiment of the present invention is shown. figure 2 A schematic cross-sectional view of a zero-power consumption pressure sensor according to an embodiment of the present invention is shown. Such as figure 1 Shown, the preparation method of this zero power consumption pressure sensor comprises:

[0043] Step S100, preparing reduced graphene oxide / ascorbic acid ink;

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Abstract

The invention provides a preparation method of a zero-power consumption pressure sensor, comprising: preparing reduced graphene oxide / ascorbic acid ink; placing the reduced graphene oxide / ascorbic acid ink into a 3D printer, and printing a cylindrical sample by using 3D printing technology and a ring-shaped sample located on the top surface of the cylindrical sample; the cylindrical sample and the ring-shaped sample are freeze-dried and heated for a preset time to obtain a dielectric layer blank and a spacer layer blank, and the dielectric layer blank is made of the cylindrical sample Formed, the spacer blank is formed from a circular sample; the surface of the dielectric layer blank and the spacer blank is coated with polydimethylsiloxane to obtain the dielectric layer and the spacer layer respectively; the top surface of the spacer layer is formed An upper electrode layer is formed, and a lower electrode layer is formed on the bottom surface of the dielectric layer, thereby obtaining a zero-power consumption pressure sensor. The zero-power consumption pressure sensor prepared by the scheme of the present invention has an ultra-wide detection range and high sensitivity.

Description

technical field [0001] The invention relates to the technical field of pressure sensors, in particular to a preparation method of a zero-power consumption pressure sensor. Background technique [0002] With the rapid development of Internet of Things technology, the demand for pressure sensors in the industry is also increasing day by day. However, most of the current pressure sensors require external circuits for power supply, which greatly increases the power consumption of IoT nodes. The zero-power pressure sensor can convert external pressure stimuli into electrical energy, and the pressure can be sensed by measuring the electrical signal. [0003] Existing zero-power pressure sensors can include piezoelectric materials and triboelectric nanogenerators. However, zero-power pressure sensors based on piezoelectric materials often have the disadvantage of low sensitivity, and most piezoelectric materials are not compatible with existing industrial processes. Zero-power pr...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01L9/00
CPCG01L9/00G01L9/0041
Inventor 孙旭辉文震雷浩
Owner 苏州慧闻纳米科技有限公司
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