Wavelength tuning phase shift interference testing device and testing method

Abstract

The invention discloses a wavelength tuning phase shift interference testing device and a testing method. The wavelength tuning phase shift interference testing device comprises a wavelength tuning laser, an interference testing system and an interference pattern acquisition system. According to the device, the problems of tedious installation, complex structure and the like of a conventional interferometer mechanical phase shifter are overcome, the cavity length value of the interference cavity can be calculated by adopting a self-correction phase test principle, and the phase shift error iscorrected, so that the high-precision and high-efficiency detection of the whole interferometer system is realized. Experiments show that the phase correction error value of the system device is + / -pi / 50, and the repeatability precision of the system is lambda / 1000-lambda / 2000.

Description

technical field [0001] The invention relates to optical components and system testing, in particular to a wavelength tuning phase shift interference testing device and testing method. Background technique [0002] With the continuous improvement of surface finishing requirements for optical components, materials and other parts, the application range of phase shift interference testing technology has also expanded, but many unavoidable factors will lead to phase shift errors during the test process, including surrounding Influencing factors such as test environment vibration, reference mirror accuracy, nonlinear orthogonal coupling, and imaging system distortion will reduce the quality of the interference image and make it impossible to obtain accurate phase-shift interference image results. [0003] At present, the research on phase shift interferometry technology at home and abroad mainly includes three types: sensor detection phase shift, space synchronous phase shift and...

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to realize the high-precision and high-efficiency detection of the interferometer system, and propose a wavelength-tuned phase-shift interference test device and test method, which overcomes the problems of conventional interferometer mechanical phase shifters such as complicated installation and complex structure, By adopting the principle of self-correction test phase, the length value of the interference cavity can be calculated, and the phase shift error can be self-corrected, and finally the high-precision and high-efficiency interference test of the component surface can be realized

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