Cylinder comprising fluid pressure adjustment valve having improved storage capability

Abstract

The present invention relates to a cylinder (container for storing and transporting a fluid) configured such that the same can store and transport a fluid, and can discharge the stored fluid at a configured discharge pressure under a configured condition. More specifically, the present invention relates to a cylinder having a fluid pressure adjustment valve installed on the cylinder (container forstoring and transporting a fluid) such that a stored fluid can be discharged at a configured discharge pressure under a configured condition, the fluid pressure adjustment valve being configured suchthat the fluid storage capability of the cylinder (container for storing and transporting a fluid) can be improved. The cylinder having a fluid pressure adjustment valve configured such that the fluid storage capability thereof can be improved, as described above, according to the present invention is a cylinder for storing and transporting a fluid such that the stored fluid can be discharged ata configured discharge pressure only under a configured pressure condition on the exit side, the cylinder comprising: a first regulator capable of adjusting the discharge pressure of the fluid insidethe cylinder and discharging same at the adjusted configured pressure; a second regulator configured such that the fluid, the configured pressure of which has been adjusted by the first regulator, canbe discharged only at the pressure in the configured condition / state; and a fluid pressure adjustment valve configured such that the first regulator and the second regulator are not inserted into thecylinder storage space, thereby improving the storage capability.

Description

technical field [0001] The invention relates to a cylinder (container for storing and transporting fluid), which is used for storing and transporting fluid, and discharges the stored fluid at a set discharge pressure under set conditions. [0002] More specifically, it relates to a cylinder with a fluid pressure regulating valve, which is installed in the cylinder (container for storing and transporting fluid) and under set conditions, discharges the stored fluid at a set discharge pressure, which can improve the cylinder ( Fluid storage capacity of containers for storing and transporting fluids. Background technique [0003] In general, a reliable supply of process gas is required in various industrial processes and applications. In particular, in the semiconductor manufacturing process, various processes such as etching process require the gas used to implement the process. In order to supply this gas, widely used A cylinder capable of storing and transporting fluid. [...

AI Technical Summary

Problems solved by technology

[0013] That is, the present invention provides a cylinder having a fluid pressure regulating valve that accommodates a plurality of regulators (regulators) capable of discharging stored fluid at a set discharge pressure under set conditions, thereby solving fluid storage problems. The problem of reduced capacity

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