Three-dimensional MEMS oceanic turbulence sensor

Abstract

The invention relating to the field of sensors discloses a three-dimensional MEMS oceanic turbulence sensor comprising a sensing unit including a substrate structure. Four micro-cantilever beams arranged in a cross shape are arranged on the substrate structure; the end, facing the center of the cross shape, of each micro-cantilever beam is in a curled shape; and the substrate structure and the micro-cantilever beams are coated with elastic coating bodies. Each micro-cantilever beam comprises a Si film layer, a SiN film layer and a Cr film layer which are arranged from bottom to top; a piezoresistor is arranged on the micro-cantilever beam; and each piezoresistor and three constant resistors form a Wheatstone bridge. The lower end faces of the micro-cantilever beams are connected to the substrate structure through SiO2 layers, the substrate structure is in a cuboid shape, one end of each micro-cantilever beam is arranged on one outer side edge of the substrate structure, and the other end of each micro-cantilever beam extends to the center of the substrate structure and curls upwards.

Description

technical field [0001] The invention relates to the field of sensors, in particular to a three-dimensional MEMS ocean turbulence sensor. Background technique [0002] In the field of marine detection, there are mostly one-dimensional pressure sensors and two-dimensional scissor stress sensors on the market. [0003] Ocean turbulence is a highly complex three-dimensional unsteady, irregular flow with rotation, and the magnitude and direction of the velocity of motion at any point in the water body are chaotic. Most of the existing sensors use single-point sensing, based on the assumption of "uniform and isotropic" to realize the observation of turbulent flow, but the resolution of the test is low, and it lacks the ability of three-dimensional vector test. Therefore, only by obtaining distributed, three-dimensional vector high-resolution turbulence evolution data can the ability to observe ocean turbulent mixing be improved. [0004] In recent years, with the development of ...

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Problems solved by technology

And because the amplitude of wall turbulence pulsation signal is small and the range of pulsation frequency is wide, the spatial resolution of existing ocean turbulence sensors is on the order of millimeters to centimeters, and they are all single-point sensing methods. They lack vector detection capabilities and cannot meet the requirements of wall turbulence observation. needs

For sensors that use the temperature method to test turbulent flow, the hot wire probe is easily contaminated, resulting in a decrease in sensitivity and response speed of the hot wire, resulting in a decrease in measurement accuracy and resolution

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