Integrated controllable switch type planar waveguide splitter for visible light communication and preparation method thereof

Abstract

The invention discloses an integrated controllable switch type planar waveguide splitter for visible light communication and a preparation method thereof, and the carrier is a silicon substrate nitride wafer. The silicon substrate nitride wafer includes a silicon substrate layer and a nitride layer located above the silicon substrate layer, and the nitride layer is provided with a micro-LED deviceas a light source, a MEMS electrostatic comb driver with waveguide, a planar waveguide splitter, and a nickel / gold electrode for energizing. The invention has the advantages of small volume, high integration, being able to realize the cut-off and connection between the freely controlled planar waveguide splitter and the light source, and can be applied to the optical communication network to improve the performance indexes of the visible light communication technology in the aspects of information transmission rate, information processing speed, integration degree of the terminal device, etc.

Description

technical field [0001] The invention relates to a planar waveguide splitter, in particular to an integrated controllable switch planar waveguide splitter for visible light communication, which belongs to the technical field of information materials and devices. Background technique [0002] Visible light communication is an optical communication technology developed based on LED devices. It utilizes its high-speed response characteristics of output optical power and driving current, and uses visible light as an information carrier to realize communication functions. Visible light communication technology is green and low-carbon, can realize almost zero energy consumption communication, and can effectively avoid weaknesses such as radio communication electromagnetic signal leakage, and quickly build an anti-interference and anti-interception security information space. [0003] Optical splitter is one of the core devices in optical communication technology. The coupling, bran...

AI Technical Summary

Problems solved by technology

Traditional comb teeth are generally processed by MEMS, and the size ranges from millimeters to microns. It can be regarded as a planar structure, usually including a pair of comb structures, one fixed, and the other connected by a spring to ensure that the two comb structures do not touch. And it can move within a certain range, using alternating current plus direct current bias current to supply energy, the output frequency is high but the output force and power are low

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