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Device and method for detecting scattered light based on cooperation of ultrasonic modulation

A sub-surface defect and detection device technology, which is applied in the direction of measuring device, optical testing of flaws/defects, and material analysis using sound waves/ultrasonic waves/infrasonic waves, etc., can solve the problem of ignoring damage dynamic changes and being unable to respond to sub-surface non-visual defects, etc. problem, to achieve the effect of improving sensitivity

Active Publication Date: 2020-02-11
ZHEJIANG UNIV
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Problems solved by technology

In the invention patent of application number CN201810483366.7, an optical device and method for detecting surface defects is proposed, but it is only applicable to surface defects, ignoring the dynamic changes of damage in the moving state, and cannot detect non-visual defects on the sub-surface respond

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  • Device and method for detecting scattered light based on cooperation of ultrasonic modulation
  • Device and method for detecting scattered light based on cooperation of ultrasonic modulation

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Embodiment Construction

[0033] The present invention will be specifically described below in conjunction with the accompanying drawings and this embodiment.

[0034] like figure 1 As shown, the subsurface defect detection device of the present invention includes an ultrasonic excitation device, a laser scattering detection device, a motion platform 11 and a sample stage 10;

[0035] The sample stage 10 is fixed on the motion platform 11, and the detection sample 9 is placed on the sample stage 10; the motion platform 11 drives the detection sample 9 to move in the X, Y, Z three-dimensional space, and scans and detects the surface and sub-surface of the detection sample 9;

[0036] The ultrasonic excitation device comprises an ultrasonic drive power supply 7 and an ultrasonic probe 8; the type of acoustic waves excited by the ultrasonic probe 8 on the test sample 9 is a surface wave; the ultrasonic probe 8 is fixed on the test sample 9 surface and is in close contact with the test sample 9 surface , ...

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Abstract

The invention provides a device and method for detecting scattered light based on cooperation of ultrasonic modulation. The device comprises an ultrasonic excitation device, a laser scattering detection device, a motion platform, a sample table, a photodiode, a diode amplifier and a digital oscilloscope. After combination of the ultrasonic modulation technology with the laser scattering defect detection technology, ultrasonic modulation is carried out on the surface of a detected sample; with introduction of dynamic changes of defect characteristics in a moving state, a static light scatteringeffect of defects in the state is observed and analyzed; and the amplitude and phase changes of the scattered light intensity are analyzed to realize defect detection. According to the invention, ultrasonic modulation is added in scattering detection and two defect detection results are provided; and a visual defect distribution image is provided in a scanning manner. The device and method for detecting scattered light based on cooperation of ultrasonic modulation can be applied to defect detection of precision optical elements and are particularly suitable for finished product detection of ultra-precision optical elements with strict requirements on sub-surface defects.

Description

technical field [0001] The invention relates to the field of non-destructive testing, in particular to a sub-surface defect detection device and method based on ultrasonic modulation. Background technique [0002] At present, the fields of high-precision optical systems and high-performance laser weapons have ushered in far-reaching technological developments worldwide, which put forward new requirements for the anti-damage ability of optical components, and put forward higher requirements for the corresponding defect detection technology. requirements. [0003] Laser surface scattering is a reliable and practical method for detecting surface defects. Compared with machine vision, it is fast and efficient. This technology has ultra-high sensitivity for micro-defect detection, and has been applied to surface inspection equipment by KLA-Tencor in the United States. [0004] In the field of non-destructive testing, in addition to detecting visual defects on the surface, the m...

Claims

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Application Information

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IPC IPC(8): G01N21/88G01N21/49G01N21/17G01N29/24
CPCG01N21/1717G01N21/49G01N21/8851G01N29/2418
Inventor 孙安玉李智宏居冰峰王传勇胡耀元管凯敏
Owner ZHEJIANG UNIV
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