Novel sensing grid for displacement measurement and working method thereof

Abstract

The invention aims to provide a novel sensing grid for displacement measurement and a working method thereof. The technical scheme of the invention is that the novel sensing grid is formed by a measuring head structure and a sensing grating ruler structure, the measuring head structure can horizontally move on the sensing grating ruler structure, the measuring head structure is provided with a primary coil, four secondary coils and a reference coil, the four secondary coils are horizontally and uniformly distributed on an inner side of the primary coil at equal intervals, the sensing grating ruler structure is provided with a plurality of sensing gaps and a reference gap, a whole sensor is based on the inductance principle of a transformer, through the redesign of structures of the primarycoil and the secondary coils, precise displacement information and data can be obtained by using a periodic change caused by magnetic lines of force generated by the coils, the anti-interference capability and the signal quality of a signal are improved in cooperation with a high-frequency exciting current in the aspect of a circuit, the defects that a traditional optical grating has poor anti-pollution capability and the impact resistance and vibration resistance cannot be achieved are overcome, and the precise displacement measurement is realized.

Description

technical field [0001] The invention relates to the field of industrial precision measurement sensors, in particular to a novel sensing grid for displacement measurement and a working method thereof. Background technique [0002] With the development of numerical control technology, there is a high demand for precision displacement measurement in machining, electronics and precision measurement industries; displacement measurement sensors are similar to human eyes in the field of control, and can only be completed with accurate measurement of displacement Precise control, so as to achieve precise processing, improve product quality and the level of the entire industrial production and manufacturing industry. [0003] The current displacement measurement technologies mainly include laser interferometer and grating measurement technology; the measurement results of the laser interferometer are very accurate, and the measurement results can be directly traced to the length stan...

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Problems solved by technology

[0006] The purpose of the present invention is to provide a transformer-based inductance principle, through the structural redesign of the primary coil and the secondary coil, using the periodic changes brought about by the magnetic force lines generated by the coils, effectively overcoming the traditional grating anti-pollution Insufficient capacity, as well as the anti-shock and vibration characteristics that cannot be achieved by glass carriers, at the same time greatly reduce the high cost caused by lithography, and cooperate with the high-frequency excitation current in the circuit to improve the anti-interference ability of the signal and achieve precise displacement. A new sensor grid for measuring

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