Flexible temperature sensor and preparation method thereof

Abstract

The invention, which belongs to the field of temperature sensing electronic devices, provides a flexible temperature sensor and a preparation method thereof. The sensor comprises a first flexible substrate, a first packaging layer, a second flexible substrate and a second packaging layer. The first flexible substrate is in a comb shape; and the second flexible substrate is provided with n uniformly distributed cavities containing liquid metal. On the basis of combination of the flexible cavities with the liquid metal in structure, a plurality of temperature measuring points do not influence each other, so that the temperature measuring sensitivity is high. The positions of the temperature measuring points are not changed under different conditions such as stretching and shrinking, especially large deformation of a measured object.

Description

technical field [0001] The invention belongs to the field of temperature-sensing electronic devices, and in particular relates to a flexible temperature sensor capable of ensuring that temperature measuring points do not deviate and a preparation method thereof. Background technique [0002] Flexible temperature sensors, according to different use environments (such as used in different fields such as medical health monitoring, sports, communications, aerospace, fire protection, etc.), combine temperature sensors with different flexible substrate materials to make sensing devices. However, there are still some problems to be solved in the application of the current flexible temperature sensor: (1) Since most of the sensitive units of the flexible temperature sensor are based on rigid inorganic materials, the modulus of which is much greater than that of the flexible substrate material, the flexible substrate cannot be used during use. It is difficult to achieve good strain c...

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Problems solved by technology

However, there are still some problems to be solved in the application of the current flexible temperature sensor: (1) Since most of the sensitive units of the flexible temperature sensor are based on rigid inorganic materials, the modulus of which is much greater than that of the flexible substrate material, the flexible substrate cannot be used during use. Difficult to achieve good strain coupling with rigid sensitive elements

Even if the flexible base material can enhance the tensile performance within a certain range, if the measurement condition of the measured object is under the condition of large deformation, the limited stretching is still not enough, which will lead to the drift of the temperature measurement point, As a result, the temperature measurement position is inaccurate; (2) the thermal diffusivity of the flexible polymer substrate material widely used at present is on the low side, which makes the thermal diffusion time from the object to be measured to the sensitive unit above the substrate too long, thus making it difficult for the temperature sensitive unit to Timely sense the temperature change of the measured object

[0003] For the current flexible temperature sensor, we have implemented a flexible temperature sensor that combines a flexible material cavity with liquid metal. This structure can not only solve the above-mentioned temperature measurement point drift and long thermal diffusion time under large deformation problem, and can realize the function of multi-point temperature measurement and the temperature measurement points do not affect each other, so as to reflect the temperature difference of different temperature measurement points

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