Extensible capacitive flexible biological electrode array and preparation method thereof
A bio-electrode and flexible technology, applied in the field of medical devices, can solve problems such as contact mismatch and influence of signal acquisition effect, and achieve the effect of excellent fitting effect, good extensibility, and high-quality signal acquisition effect.
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[0036] Such as figure 2 As shown, this embodiment provides a method for preparing a stretchable capacitive flexible bioelectrode array, which specifically includes the following steps:
[0037] Step 1: Place SiO with size 16mm x 12mm 2 The substrate was cleaned with acetone and alcohol, and then a layer of photoresist was spin-coated on it, heated at 100°C for 2 minutes to dry, and a layer of 120 μm thick PDMS film was spin-coated on the photoresist, and then placed in Heating in an oven at 60°C for 1 hour and curing to obtain a PDMS substrate, wherein the PDMS film is obtained by mixing the resin and the curing agent uniformly in a ratio of 10:1;
[0038] Step 2: Place the SiO with the size of 16mm×12mm 2 The substrate was cleaned with acetone and alcohol, and then a layer of PI with a thickness of 2 μm was spin-coated on it, and then placed in an oven at 180 ° C for 2 hours to cure;
[0039] Step 3: Prepare a 200nm thick, 2×2 Au electrode array on the surface of the PI f...
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