An ultraviolet-visible dual-band photodetector
A photodetector and dual-band technology, applied in circuits, electrical components, semiconductor devices, etc., can solve problems such as inability to detect, increase the complexity of device manufacturing, and narrow detection range of photodetectors
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[0017] A low-temperature AlN nucleation layer 102 is grown on the C-plane sapphire by MOCVD, and the thickness of the AlN nucleation layer is 20 nm;
[0018] growing a high-temperature AlN buffer layer 103 on the low-temperature AlN nucleation layer 102, the thickness of the high-temperature AlN buffer layer being 200 nm;
[0019] A layer of n-type Al is grown on the high-temperature AlN layer 103 x1 Ga 1-x1 N buffer layer 104, Al x1 Ga 1-x1 The thickness of the N buffer layer is 300nm, using SiH 4 Doping, the doping concentration is 4×10 18 cm -3 , component x1 is 0.2;
[0020] in Al x1 Ga 1-x1 A layer of n-type Al is grown on the N buffer layer 104 x2 Ga 1-x2 N layer 105; n-type Al x2 Ga 1-x2 The thickness of the N layer 105 is 500nm, using SiH 4 Doping, where the doping concentration of Si is 2×10 18 cm -3 , Al composition x2 is 0.2;
[0021] In n-type Al x2 Ga 1-x2 A layer of non-doped i-type Al is grown on the N layer 105 x3 Ga 1-x3 N absorption layer ...
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