Sheet longitudinal transporting truck and vapor deposition equipment

Abstract

The invention discloses a sheet longitudinal transporting truck and vapor deposition equipment, wherein the transporting truck comprises a high-narrow and longitudinally tiltable truck main body, thetruck main body is provided with at least one group of limiting blocks and fasteners, and the limiting blocks and the fasteners cooperate with the truck main body to form a space for longitudinally placing the sheet and limiting the sheet to the truck main body; the truck main body is longitudinally placed on a row of guide rollers and driven to move by the guide rollers, a row of guide rollers isrotationally arranged on a wheel base and connected with a power mechanism driving the guide rollers to rotate, and the truck main body is maintained in a straight state by magnetic attraction. The scheme maintains the straight state of the truck through the high-narrow truck main body structure and the magnetic adsorption, so the horizontal space of an equipment cavity is reduced, and the opening and closing time and the opening width a the valve are completely shortened, therefore the processing efficiency is effectively improved and the gas exchange among different cavities is avoided, andimpurities and dust falling on a workpiece are reduced, which is beneficial to improving the quality of deposition.

Description

technical field [0001] The invention relates to the field of gas-phase deposition equipment, in particular to a sheet vertical transport trolley and gas-phase deposition equipment. Background technique [0002] Vapor deposition technology is to use the physical and chemical processes that occur in the gas phase to form functional or decorative metal, non-metal or compound coatings on the surface of the workpiece. [0003] When performing vapor deposition, it is sometimes necessary to place the workpiece on the jig and move it between different cavities. For some sheet workpieces, if they are placed on the jig in a flat manner, they occupy The horizontal space is large, which makes the deposition chamber must be large enough to effectively place materials. [0004] At the same time, when the workpiece moves from one cavity to another, the workpiece that is too wide will also require the valve between the cavities to open enough space to pass through. It is beneficial to imp...

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Problems solved by technology

[0004] At the same time, when the workpiece moves from one cavity to another, the workpiece that is too wide will also require the valve between the cavities to open enough space to pass through. It is beneficial to improve the processing efficiency. On the other hand, due to the large opening area of ​​the valve, this causes a large amount of gas exchange between different cavities, which affects the gas environment in different cavities and affects the deposition effect in different cavities.

[0005] In addition, when the workpiece is placed in a flat manner, during the deposition process, dust, impurities, etc. will fall on the surface of the workpiece, affecting the deposition quality

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