High-precision full-automatic double-side exposure machine

Abstract

The invention relates to a high-precision full-automatic double-side exposure machine. The exposure machine comprises a support, an upper frame system, an alignment system, a charging and dischargingsystem, a manipulator system, a visual system, an exposure module, a constant temperature and humidity module and a control system; the support is used to support different modules and systems installed in the exposure machine; the upper frame system is positioned in the frame, and comprises an upper masking plate providing patterns for exposure of an upper surface of a product; the alignment system is provided with a lower masking plate providing patterns for exposure of a lower surface of the product, used to align the upper and lower masking plates accurately, and positioned under the upperframe system; and the charging and discharging system comprises a charging system and a discharging system, and is used to charge and discharge the product automatically. The upper and lower maskingplates are aligned via the alignment system and the visual system, pattern offset during exposure can be prevented, the exposure quality is improved, the alignment can realize adjustment in multiple directions and angles, and the alignment precision is high.

Description

technical field [0001] The invention belongs to the technical field of exposure machines, in particular to a high-precision full-automatic double-sided exposure machine. Background technique [0002] Ultraviolet exposure machine refers to a machine that transfers image information on a film or other transparent body to a surface coated with a photosensitive material by turning on the light and emitting ultraviolet rays of UVA wavelength. The exposure machine has a single-side exposure machine and a double-side exposure machine. [0003] Chinese patent CN106547174B discloses a fully automatic double-sided exposure machine including a machine table, which is sequentially set on the same axis as a feeding area, a first-side exposure area, a transfer flap area, a second-side exposure area, and a discharge area; There is a feed transfer mechanism, a first exposure mechanism, and a transfer turnover mechanism, which are set across the upper exposure area of ​​the first side of the...

AI Technical Summary

Problems solved by technology

[0005] The double-sided exposure machines in the above two invention patents realize double-sided exposure by flipping the workpiece, and each exposure must be flipped, the working procedure is cumbersome, and the efficiency is low

At the same time, the use of the turning mechanism will inevitably lead to an increase in the volume of the equipment, and the alignment control accuracy between the exposure pattern and the upper and lower surfaces of the workpiece is not high

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