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Full-automatic dry cleaning device of probe cards

A cleaning equipment and fully automatic technology, applied in the field of probe cards, can solve the problems of inability to detect and clean probe cards, judging standard deviation differences, and errors in manual detection.

Inactive Publication Date: 2019-09-13
合肥新汇成微电子股份有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The invention provides a fully automatic dry-type cleaning device for probe cards, which solves the problems that the probe cards cannot be detected and cleaned well, and there are errors in manual detection and differences in judgment standards.

Method used

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  • Full-automatic dry cleaning device of probe cards
  • Full-automatic dry cleaning device of probe cards
  • Full-automatic dry cleaning device of probe cards

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Embodiment Construction

[0024] The present invention will be further described below in conjunction with the accompanying drawings and embodiments.

[0025] Please refer to figure 1 , figure 2 , image 3 , Figure 4 , Figure 5 and Figure 6 ,in, figure 1 A structural schematic diagram of a preferred embodiment of the probe card fully automatic dry cleaning equipment provided by the present invention; figure 2 for figure 1 A top view of the structure of the shown movable slot; image 3 for figure 2 The structural sectional view of the shown box; Figure 4 for figure 1 Structural side view of the displacement structure shown; Figure 5 for figure 1 The top view of the structure of the operation panel shown; Figure 6 for figure 1Schematic diagram of the clamping structure shown. The probe card automatic dry cleaning equipment includes: a workbench 1; a control tank 2, the control tank 2 is opened inside the workbench 1, and the inside of the control tank 2 is provided with a rotating...

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Abstract

The invention provides a full-automatic dry cleaning device of probe cards. The full-automatic dry cleaning device of probe cards comprises: a worktable; and a control slot, wherein the control slot is opened in the worktable, a rotating structure is disposed in the control slot, the rotating structure comprises a rotating shaft, a bottom end of the rotating shaft is rotatably connected to the bottom of an inner wall of the control slot, and a top end of the rotating shaft passes through the worktable and extends to the top of the worktable. The full-automatic dry cleaning device of probe cards provided by the invention not only has movement functions of front and back, left and right, but also has a rotary motion function, thereby facilitating the detection of the directions of the probecards by a laser gun main body, facilitating more comprehensive detection of a visual detector, and greatly improving the detecting effect and the subsequent cleaning effect, the detection and maintenance of the probe cards by manpower is well replaced, the efficiency can be greatly improved, the system setting and operation are simple and convenient, and no professional card maintenance trainingis required.

Description

technical field [0001] The invention relates to the field of probe cards, in particular to a fully automatic dry cleaning device for probe cards. Background technique [0002] The probe card is a test interface, which mainly tests the bare core. By connecting the testing machine and the chip, the chip parameters are tested by transmitting signals. Has been advancing to below 32 nanometers. At present, the products are thin, light and small, and the IC volume is getting smaller and stronger, and the number of pins is increasing. In order to reduce the area occupied by the chip package and improve the performance of the IC, flip-chip packaging is generally used in graphics at this stage. Chips, chipsets, memory and CPU, etc. [0003] However, the existing probe card cleaning equipment has a large number of shortcomings. For example, the existing probe card cleaning equipment cannot detect and clean the probe card well. Manual detection is usually used, and manual detection h...

Claims

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Application Information

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IPC IPC(8): G01B11/00G01B11/08B08B7/00B08B13/00
CPCB08B7/0042B08B13/00G01B11/00G01B11/08
Inventor 黄朝龙张卫国杜天祥
Owner 合肥新汇成微电子股份有限公司
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