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Open VPX based synchronous motion control system and method of high-precision high-speed motion platform

A technology of synchronous motion and high-speed motion, which is applied in the general control system, control/regulation system, digital control, etc., can solve the problems of unsatisfactory data transmission rate, limited transmission rate, electrical connection limitation, etc., and improve the performance of data interaction servo , convenient maintenance and debugging, and the effect of improving bandwidth

Active Publication Date: 2019-08-06
GUILIN UNIV OF ELECTRONIC TECH
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AI Technical Summary

Problems solved by technology

Although the VPX bus is compatible with a variety of high-speed serial data buses, it is limited by the electrical connection and the transmission rate is limited. 4×Serial can reach up to 10Gbps, which cannot meet the needs of continuously increasing data transmission rates.

Method used

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  • Open VPX based synchronous motion control system and method of high-precision high-speed motion platform
  • Open VPX based synchronous motion control system and method of high-precision high-speed motion platform
  • Open VPX based synchronous motion control system and method of high-precision high-speed motion platform

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Embodiment Construction

[0069] Embodiments of the present invention are described below through specific examples, and those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification. The present invention can also be implemented or applied through other different specific implementation modes, and various modifications or changes can be made to the details in this specification based on different viewpoints and applications without departing from the spirit of the present invention. It should be noted that, in the case of no conflict, the following embodiments and features in the embodiments can be combined with each other.

[0070] It should be noted that the diagrams provided in the following embodiments are only schematically illustrating the basic ideas of the present invention, and only the components related to the present invention are shown in the diagrams rather than the number, shape and shape of the compo...

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Abstract

The invention provides an Open VPX based synchronous motion control system of a high-precision high-speed motion platform. The system comprises a system control card, a motion control card, a data collection control card, a grating signal processing card, a multichannel digital to analog conversion controller, a motion platform environment information collection card, a motor driver, a current vortex collection board, a sensor information collection plate, a grating scale reading head and a host computer. Open VPX supports VITA66.4 optical interconnection backboard bus protocols, a used fiberconnector supports multichannel fiber interconnection, the single-channel data transmission rate can reach 14Gbps, an optical interconnection backboard bus is used for data transmission, and the requirements of constant improvement of the high servo frequency, large data bulk and high instantaneity for the synchronous control system of the motion platform of the high-end photo-etching machine canbe met.

Description

technical field [0001] The invention relates to a motion control system for precision mechanical equipment such as semiconductors, in particular to an Open VPX-based high-precision and high-speed motion platform synchronous motion control system. Background technique [0002] The motion table control system of the lithography machine is an important part of the lithography machine of the semiconductor chip manufacturing equipment. The effect directly affects the overlay accuracy of the lithography machine. Since the synchronous motion control system requires multiple subsystems to work together, the industrial control bus is used to organically connect the subsystems and make them work in an orderly manner to achieve the desired synchronous motion effect. [0003] In the past, lithography machine manufacturers and some research institutions at home and abroad mostly used the VME bus as the backplane bus of the synchronous motion control system. With continuous improvement,...

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Application Information

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IPC IPC(8): G05B19/414
CPCG05B19/4142G05B2219/34013
Inventor 熊显名张文涛周航汛杜浩张丽娟
Owner GUILIN UNIV OF ELECTRONIC TECH
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