Filter unit and plating apparatus including same

Abstract

A filter unit according to an embodiment of the present invention may comprise: a cyclone body member which receives fluid introduced thereinto in one direction and has a circular internal sectional shape to form a rotational flow of the fluid; and a discharge member which is disposed on a central upper end portion of the cyclone body member and has a cross section, at least a part of which has anoncircular shape, so as to reduce the rotational flow and then discharge the fluid.

Description

technical field [0001] The invention relates to a filter unit and a coating device comprising it. Background technique [0002] It is hereby indicated that the content described in this section is only for providing background information of the present invention, and does not constitute the disclosed prior art. [0003] Vacuum evaporation is a technique of heating and evaporating a solid coating material by various methods in a vacuum atmosphere to convert it into steam, and spraying it on a plated object such as a steel plate to form a thin film. Classify by covering method. [0004] Representative vacuum evaporation methods include thermal evaporation, electron beam evaporation, and electro-magnetic levitation evaporation. [0005] In these vacuum deposition methods, the vapor pressure and heating temperature of the coating material determine the coating rate. Since the vapor pressure is an inherent characteristic of the substance and cannot be controlled arbitrarily, ...

AI Technical Summary

Problems solved by technology

[0011] However, when the coating steam is discharged from the inside of the filter unit as described above, the coating steam still flows in a swirling manner, so a difference in the density of the coating steam will occur.

[0012] As a result, when the coating steam discharged from the filter unit is sprayed on the object to be coated such as a steel plate, there is a problem that the uniformity of the coating is lowered.

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