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Phase reconstruction method for single interference fringes with carrier frequency

A technology of interference fringes and phase reconstruction, which is applied in the direction of measuring devices, instruments, and optical devices, etc., can solve the problems of unfavorable automatic operation of phase reconstruction algorithms, inability to meet real-time interferometric measurements, and easy data loss of carrier frequency components, etc., to achieve Real-time measurement and analysis, easy programming, and cost-reducing effects

Inactive Publication Date: 2019-06-21
HARBIN UNIV OF SCI & TECH
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Problems solved by technology

At present, the processing of carrier frequency components is generally based on the subjective analysis and judgment of human participation. The extracted carrier frequency components are prone to da

Method used

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  • Phase reconstruction method for single interference fringes with carrier frequency
  • Phase reconstruction method for single interference fringes with carrier frequency
  • Phase reconstruction method for single interference fringes with carrier frequency

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example 1

[0052] The present invention measures the commissioned aspherical lens with a diameter of 52 mm through a self-built measuring device based on the Tieman-Green interference principle, and uses a HeNe laser with a wavelength of 632.8 nm as a light source. The steps for phase reconstruction of the interferogram are as follows: figure 1 As shown, the specific steps are:

[0053] Step 1: Read the single interference fringe pattern with carrier frequency collected by the interferometric device, such as figure 2 shown;

[0054] Step 2: For the fringes in the circular contour in the interferogram, use the continuation method based on the maximum fringe similarity to extend the fringes from the circular domain to the rectangular area. The continuation is divided into three steps: (1) Calculation The preferential continuation coefficient of any point P on the stripe boundary, the template centered on point P is ψ p ,Such as image 3 (2) Determine the point P' with the largest prio...

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Abstract

The invention discloses a phase reconstruction method for single interference fringes with the carrier frequency. The method is characterized in that firstly, a single interference fringe pattern withthe carrier frequency acquired by an interference measuring device is read; secondly, fringes in the circular contour in the interference pattern are extended through the extension method based on the largest stripe similarity, and the interference fringes are extended from a circular domain to a rectangular region; two-dimensional Fourier transform is performed on the rectangular interference fringes after extension, a top view image of the spatial spectrum is subjected to binary and corrosion expansion image processing to determine the boundary and centroid coordinates of the positive first-order spectrum, and a carrier frequency component is demodulated through translation; two-dimensional inverse Fourier transform is performed on a demodulated carrier frequency component to obtain a wrapped phase; and lastly, a wavefront phase is reconstructed through the discrete two-dimensional cosine transform unwrapping algorithm. The method is advantaged in that compared with an interferencefringe analysis method in the prior art, programming and automation of the algorithm are easy to realize, and phase reconstruction accuracy can be improved.

Description

technical field [0001] The invention belongs to the field of optical interference measurement, and in particular relates to a method for phase reconstruction of a single interference fringe with a carrier frequency. Background technique [0002] Optical interferometry is widely used in optical surface measurement due to its high precision. To analyze the interference fringes, solve the phase, and reconstruct the three-dimensional profile of the optical surface, a phase demodulation algorithm is required. At present, the most widely used phase shift method has the characteristics of high calculation accuracy and good effect of filtering background noise, but the vibration of the environment and experimental equipment and the disturbance of air flow will bring random errors in the physical process realized by phase shift. Reduce the accuracy of interferometric measurement, so the phase shift method has very high requirements on the measurement environment. However, the singl...

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Application Information

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IPC IPC(8): G01B11/24
Inventor 张洪鑫张旭仇浩然周昊
Owner HARBIN UNIV OF SCI & TECH
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