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A pressure sensor with high sensitivity and wide range

A pressure sensor, high-sensitivity technology, applied in the measurement of the property force of piezoelectric devices, and the measurement of property force of piezoelectric resistance materials, etc., can solve problems such as low sensitivity

Active Publication Date: 2021-09-21
CHONGQING UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] More generally, a sensitive material usually has high sensitivity in a certain pressure range, is less sensitive below this pressure range, and is also less sensitive or saturated above this pressure range

Method used

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  • A pressure sensor with high sensitivity and wide range
  • A pressure sensor with high sensitivity and wide range
  • A pressure sensor with high sensitivity and wide range

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0025] As shown in Figure 1, a high-sensitivity and wide-range pressure sensor of this embodiment includes a housing and a plurality of sensing elements located in the housing; each sensing element includes a pressure-capacitive / piezoresistive sensitive material 1- 4 and an upper electrode plate and a lower electrode plate respectively arranged on the upper and lower sides of the sensitive material 1-4; multiple sensing elements include a central sensing element 1-10 and a second stage concentrically sheathed on the central sensing element 1-10 Sensing elements 1-9 and outermost-level sensing elements 1-8, and the thickness of each level of sensing elements in the sensor gradually decreases from the outer level to the center, that is, the outermost-level sensing elements 1-8, the second The thicknesses of the sensitive materials 1-4 of the level sensor elements 1-9 and the center sensor elements 1-10 decrease successively (the thickness of the electrode plates of the sensor ele...

Embodiment 2

[0028] like image 3 As shown, a high-sensitivity and wide-range pressure sensor of this embodiment includes a housing and a multi-stage sensing element located in the housing, which is the same as in Embodiment 1. The housing includes a top surface (not shown in the figure), a bottom surface 2 -2 and the side 2-1 connected between the top surface and the bottom surface 2-2; each level of sensing element includes a pressure capacitive / piezoresistive sensitive material 2-7 and a sensor located on the upper and lower sides of the sensitive material 2-7 An upper electrode plate and a lower electrode plate; the multi-stage sensing elements include a central sensing element 2-4 and multiple groups of outer-level sensing elements ( image 3 Only one group is shown in the figure); the outer-level sensing element group includes six outer-level sensing elements 2-3 with the same thickness that are annularly distributed around the central sensing element 2-4, wherein the central sensing...

Embodiment 3

[0030] In this embodiment, the circular central sensor, second-level sensor element, and outermost sensor element in Embodiment 1 are replaced with concentrically arranged triangles, squares, or regular hexagons, etc., thereby forming a concentric triangular distribution. , concentric square distribution, or concentric hexagonal distribution, etc.;

[0031] Alternatively, the central sensing element and the outer sensing element of the cylindrical structure in the concentric annular independent distributed structure in the second embodiment are replaced with triangular prisms, polygonal prisms or other columnar structures.

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Abstract

The invention provides a pressure sensor with high sensitivity and wide range, which includes a casing and multi-stage sensing elements inside the casing; when the external pressure on the casing gradually increases, the multi-stage sensing elements have different Thickness or height, so that the multi-level sensing elements are pressed sequentially; the high-sensitivity and wide-range pressure sensor of the present invention is based on the high sensitivity of the sensing elements at different pressure ranges, and specifically uses the pressure sensor sensitive material Easy deformation can improve the sensitivity of the sensor, and the difficulty of deformation of the sensitive material can increase the characteristics of the sensor range, or the corresponding level of sensing elements that play a major role in the process of sequential pressure provide high sensitivity, thereby comprehensively improving the sensitivity and sensitivity of the sensor. range.

Description

technical field [0001] The invention relates to a pressure sensor, in particular to a pressure sensor with high sensitivity and wide range. Background technique [0002] Sensitivity and range are two important performance parameters of the sensor, and the two are generally in an opposing relationship that restricts each other, which cannot meet people's comprehensive needs for these two aspects in many occasions. "Effect of magneto-strain linkage on the piezoresistive effect of magnetorheological elastomers". Journal of Composite Materials. 2017 (9) and "Piezo-capacitive behavior of magnetically structured particles based conductive polymer with high sensitivity and wide working range". Journal of Materials Chemistry C, 2018, 6(20) and other documents pointed out that a conductive rubber filled with magnetic metal particles can be controlled by applying a magnetic field during the molding process to control the spatial distribution of the filled particles. The piezoresistive...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01L1/18G01L1/16
Inventor 谢磊范泽智秦虹舒畅廖昌荣
Owner CHONGQING UNIV
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