Eddy current displacement sensing probe suitable for strong electromagnetic field interference and bridge circuit

Abstract

The invention discloses an eddy current displacement sensing probe suitable for strong electromagnetic field interference and a bridge circuit. The sensing probe is composed of a detecting coil, a quartz spacer and a balancing coil. The difference between the vertical distance of the detecting coil and the balancing coil and a target conductor enables the parametric variation of the characteristics of the two coils to form difference on sensitivity of distance changes of the target conductor, the spatial positions of the detecting coil and the balancing coil are close to enable induced electromotive force formed on the two coils by the strong electromagnetic field interference of the environment to be close. The bridge circuit is composed of an excitation signal source, a balanced bridge,a high-pass filter and an instrument amplifier, the induced electromotive force formed by the strong electromagnetic field interference of the environment is offset by the balanced bridge, and the high-pass filter is used for further attenuating the difference of the induced electromotive force on the two coils. The eddy current displacement sensing probe suitable for the strong electromagnetic field interference and the bridge circuit abandon a traditional electromagnetic shielding mode, and are suitable for realizing high-resolution displacement and vibration measurement under a strong electromagnetic field interference environment such as large motors and switch equipment.

Description

technical field [0001] The invention relates to the field of displacement and vibration measuring equipment, in particular to an eddy current displacement sensing probe and a bridge circuit suitable for strong electromagnetic field interference. Background technique [0002] With the development of ultra-precision manufacturing technology, the requirements for displacement sensors are getting higher and higher, the measurement accuracy has been improved from the micron level to the nanometer level, and non-contact sensors have gradually become the mainstream of industrial applications. Non-contact displacement sensors mainly include capacitive, inductive, eddy current and optical displacement sensors, among which eddy current displacement sensors have many advantages such as high sensitivity, good reliability and low cost, and are widely used in industrial sites of ultra-precision processing and manufacturing . [0003] The basic principle of the eddy current displacement s...

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Problems solved by technology

[0005] The purpose of the present invention is to provide an eddy current displacement sensing probe and bridge circuit suitable for strong electromagnetic field interference, so as to solve many problems existing in the elimination of strong electromagnetic field interference by using traditional electromagnetic shielding technology, without increasing the sensing probe and electric current. Under the premise of bridge circuit design complexity and production cost, improve the comprehensive application ability of eddy current displacement sensor in complex industrial environment

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