Two-dimensional transition metal sulfide gas sensor based on antenna structure, and preparation thereof

Abstract

The invention discloses a two-dimensional transition metal sulfide gas sensor based on an antenna structure, and preparation thereof. The gas sensor comprises a two-dimensional transition metal sulfide TMDCs film which is patterned into two connected parts of a conductive channel and an antenna structure, wherein the surface of the conductive channel is covered with a passivation layer; the antenna structure is used for adsorbing the gas to be tested as a gas sensitive layer; when molecules of the gas to be tested are adsorbed on the surface of the antenna structure and are performed with charge transfer, the concentration of carriers in the antenna structure changes to form a concentration gradient and induce the diffusion of the carriers, so that the concentration of the carriers in theconductive channel changes, and finally the resistance of the conductive channel is changed, thereby realizing the sensing of the gas to be tested by the gas sensor. The sensor, by distinguishing thegas sensitive layer and the conductive channel into two parts on the sensor structure, not only helps to increase the stability of the sensor, but also can improve the sensitivity of the gas sensor byutilizing the gain effect of the antenna structure.

Description

technical field [0001] The invention belongs to the technical field of gas sensors, and more specifically relates to a two-dimensional transition metal sulfide (TMDCs) gas sensor based on an antenna structure and a preparation method thereof. Background technique [0002] A gas sensor is a device or device that can sense a certain gas and its concentration in the environment. It can convert information related to the type and concentration of the gas into electrical, optical, and acoustic signals that can be directly read and quantified by the device. In order to detect, monitor, analyze, alarm, etc. In recent decades, gas sensors have been widely used in industrial production, environmental monitoring, medicine and health and other fields. According to the detection principle, gas sensors can be divided into electrical, optical, electrochemical, calorimetric, etc. Among them, the metal oxide semiconductor SnO 2 , ZnO, Fe 2 o 3 The electrical gas sensor represented by th...

AI Technical Summary

Problems solved by technology

To sum up, in the resistive TMDCs gas sensor with conventional structure, the TMDCs thin film is both a gas sensitive layer and a conductive channel, which greatly limits the further improvement of the device responsivity and causes serious degradation of device stability.

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