A kind of ultra-high vacuum heating device and heating method thereof

Abstract

The invention relates to an ultra-high vacuum heating device and a heating method thereof, which has an adapter that can be connected with a magnetic rod, through which the entire sample stage can be passed out and introduced into the ultra-high vacuum system; The sample slot can realize the simultaneous movement of the sample and the heating sample stage through the sample slot; it has a DC heating brush system, combined with a specific sample holder, the DC heating brush can realize the directional transmission of DC on the sample; it has a positioning conductive jack , inserting the positioning plug installed in the chamber through the jack can not only realize the positioning of the sample stage, but also realize the connection with the circuit outside the chamber, so as to realize the direct current heating without breaking the vacuum; the heating stage has a central hollow structure, combined with a specific Sample holder, using an infrared laser heater to achieve laser heating of the sample. The invention can realize good heating ability for samples while maintaining the ultra-high vacuum environment, has fast heating speed, high temperature, small temperature gradient and accurate temperature measurement.

Description

technical field [0001] The invention belongs to the technical field of vacuum heating, in particular to an ultra-high vacuum heating device and a heating method thereof. Background technique [0002] Vacuum refers to the pressure below atmospheric pressure (10 5 Pa) gas space, according to the range of vacuum, usually can be divided into rough vacuum (10 5 -10 3 Pa), low vacuum (10 3 -10 -1 Pa), high vacuum (10 -1 -10 -6 Pa), ultra-high vacuum (10 -6 -10 -10 Pa) and extremely high vacuum (<10 -10 Pa). In the field of ultra-high vacuum, the existence of gas molecules, including molecules adsorbed on the walls of vacuum containers, is almost negligible, and the maintenance time of solid clean surfaces can be relatively extended. Vacuum technology is widely used in electronic technology, aerospace technology, accelerators, surface physics, microelectronics, material science and other fields. In particular, in a vacuum environment, research in the fields of surface...

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Problems solved by technology

[0004] At present, my country's high-end vacuum equipment R & D and production and technology popularization are far from meeting the needs, let alone have the strength to compete directly with international competitors. A considerable proportion of the country's annual scientific research funds are used to purchase foreign scientific research equipment , which not only makes our country's scientific research controlled by others, but also makes it difficult to have original scientific research results

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