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Automatic washing equipment for washing filter, control system and control method

A filter cleaning and automatic cleaning technology, applied in filter regeneration, chemical instruments and methods, fixed filter element filters, etc., can solve problems such as potential safety hazards, fire, and impact on health, and achieve the effect of safety and efficiency

Pending Publication Date: 2019-03-08
FOCUS LIGHTINGS SCI & TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0002] At present, the filters used for MOCVD are manually cleaned and maintained, but the used filters have residual MO sources, and the unreacted MO sources are in contact with air and water, which is prone to chemical reactions and causes fires. security risks, so it is very unsafe
In addition, the density of waste ash remaining on the filter is low, and it is easy to inhale or penetrate into the skin through dust-free clothing during manual maintenance, thus affecting human health

Method used

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  • Automatic washing equipment for washing filter, control system and control method
  • Automatic washing equipment for washing filter, control system and control method
  • Automatic washing equipment for washing filter, control system and control method

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Embodiment Construction

[0027] The present invention will be described in detail below in conjunction with specific embodiments shown in the accompanying drawings. However, these embodiments do not limit the present invention, and any structural, method, or functional changes made by those skilled in the art according to these embodiments are included in the protection scope of the present invention.

[0028] In each drawing of the present invention, for convenience of illustration, some dimensions of structures or parts are exaggerated relative to other structures or parts, and therefore, are only used to illustrate the basic structure of the subject matter of the present invention.

[0029] The terms used herein to denote relative spatial positions such as "upper", "above", "under", "under", etc. are for convenience of description to describe the relative position of one element or feature relative to another as shown in the drawings. Relationships of units or features. The terms of spatial relati...

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Abstract

The invention discloses automatic washing equipment for washing a filter, a control system and a control method. The filter is used for MOCVD (Metal Organic Chemical Vapor Deposition); the automatic washing equipment comprises an alkali solution groove for containing an alkali solution, a clean water groove for containing clean water and a circulating pump; the automatic washing equipment has twoworking state; when the automatic washing equipment works at the first working state, the circulating pump is used for charging the alkali solution in the alkali solution groove into the filter and the alkali solution passing through the filter is circulated into the alkali solution groove; when the automatic washing equipment works at the second working state, the circulating pump is used for charging the clean water in the clean water groove into the filter and the water passing through the filter is circulated into the alkali solution groove. The automatic washing equipment disclosed by theinvention is more environmentally friendly, is safe and has higher efficiency.

Description

technical field [0001] The invention relates to an automatic cleaning device, a control system and a control method for cleaning a filter, in particular to an automatic cleaning device, a control system and a control method for cleaning an MOCVD filter. Background technique [0002] At present, the filters used for MOCVD are manually cleaned and maintained, but the used filters have residual MO sources, and the unreacted MO sources are in contact with air and water, which is prone to chemical reactions and causes fires. security risks, so it is very unsafe. In addition, the density of waste ash remaining on the filter is small, and it is easy to inhale or penetrate into the skin through the dust-free clothes during manual maintenance, thereby affecting human health. Contents of the invention [0003] The object of the present invention is to provide an automatic cleaning device, a control system and a control method thereof for cleaning filters, the automatic cleaning dev...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B01D41/00
CPCB01D41/00C23C16/4407C23C16/4412B01D29/66B01D29/605B01D29/608B01D35/16
Inventor 蒲健朱建海陈军姚志伟李本功
Owner FOCUS LIGHTINGS SCI & TECH
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