Flexible multi-range capacitive-type pressure sensor and preparation method and application thereof

Abstract

The invention belongs to the field of pressure sensor design and manufacturing, and specifically discloses a flexible multi-range capacitive-type pressure sensor and a preparation method and an application thereof. The sensor comprises a flexible substrate, a multi-stage support island and a pressure sensitive film, which are sequentially arranged from bottom to top. The multi-stage support islandis composed of a central circular boss located at the middle of the pressure sensitive film, and n-stage annular bosses which are disposed on the pressure sensitive film and are concentrically arranged with the central circular boss. A top electrode is disposed between the central circular boss and the pressure sensitive film, and the heights of the n-stage annular bosses sequentially increase from the inside to the outside, wherein the outermost annular boss is attached to the flexible substrate. The bottom portion of the flexible substrate is provided with a bottom electrode directly belowthe central circular boss. The sensor provided by the invention has a wide range of pressure measurement while maintaining high sensitivity, and solves the contradiction between the range and sensitivity of the pressure sensor, and can meet the requirements of the pressure range and sensitivity of different wind tunnel tests.

Description

technical field [0001] The invention belongs to the field of pressure sensor design and manufacture, and more specifically relates to a flexible multi-range capacitive pressure sensor and its preparation method and application. Background technique [0002] Smart skin is a smart material structure with self-diagnosis, self-adaptation, self-learning, self-repair and other capabilities. , information processing and driving three functions, it has great application prospects in aerospace, aviation, navigation, high-speed rail, wind tunnel, robot skin and other fields. Especially in the fields of aerospace and aviation, it can greatly improve the flight speed, operational maneuverability, environmental awareness and safety maintenance capabilities of aircraft. The measurement of aircraft surface pressure is particularly important for studying the aerodynamic characteristics of aircraft. The purpose of pressure distribution measurement is to measure the pressure distribution of ...

AI Technical Summary

Problems solved by technology

Patents CN103644985A and CN102798498A respectively disclose a multi-range MEMS pressure sensor chip, which realizes multi-range by integrating multiple independent sensing units on the chip, but this method has the following disadvantages: multiple independent sensor units are distributed in different positions , to actually measure the pressure at different positions; the sensor is not flexible and needs to be installed on the surface of the model, which destroys the integrity of the model

However, the sensor uses silicon as the substrate, which is not flexible, and also has the problem of punching and installing, and cannot be installed conformally with the curved surface.

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