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Ratio-controllable large-area and high-throughput composite film synthesis device and method

A composite film and synthesis device technology, applied in the field of materials science, can solve the problems of uneven thickness of film samples, uncontrollable component distribution ratio, etc., and achieve the effect of easy measurement and large sample area

Pending Publication Date: 2019-02-19
SHENZHEN ARRAYED MATERIALS TECH CO LTD
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Problems solved by technology

[0007] In view of the problems existing in the above-mentioned prior art, the object of the present invention is to provide a large-area high-throughput composite film synthesis device and method with controllable ratio, aiming at overcoming the existing high-throughput composite film synthesis device and method to obtain The disadvantages of non-uniform film sample thickness and uncontrollable component distribution ratio

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  • Ratio-controllable large-area and high-throughput composite film synthesis device and method

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Embodiment Construction

[0047] Embodiments of the present invention are described in detail below, examples of which are shown in the drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the figures are exemplary only for explaining the present invention and should not be construed as limiting the present invention.

[0048] In describing the present invention, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", " Orientation indicated by rear, left, right, vertical, horizontal, top, bottom, inside, outside, clockwise, counterclockwise, etc. The positional relationship is based on the orientation or positional relationship shown in the drawings, which is only for the convenience of describing the present invention and simplifying the description, rather than indicating ...

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Abstract

The invention provides a ratio-controllable large-area and high-throughput composite film synthesis device and method. The synthesis device is provided with a movable substrate frame; a baffle plate for shielding part of the area of a mask is arranged between the substrate frame and a target; in the film synthesis process, the baffle plate is used for covering part of mask holes, and the substrateframe is shifted to adjust relative positions and moving speeds of the substrate frame and the target, so that the stop time of plume centers in each mask hole is adjusted, the thickness of compositefilm samples corresponding to each mask hole can be controlled, and the defect of nonuniform film plating on high-throughput PLDs is overcome; and through control of the stop time ratio of the plumecenters when depositing different materials in each mask hole, the ratio among the different materials deposited in the substrate samples corresponding to each mask hole is adjusted to achieve the ratio controllability.

Description

technical field [0001] The invention relates to a device and method for simultaneously synthesizing composite thin films with different composition ratios on a substrate in the field of materials science, in particular to a large-area high-throughput composite thin film synthesis device and method with controllable ratios. Background technique [0002] One of the current research hotspots in the field of materials is high-throughput composite material synthesis, that is, each experiment can prepare a large number of samples with different material components, so that the efficiency of sample preparation can be greatly improved. At the same time, due to the regular distribution of these samples, the test can be automatically scanned, so that the efficiency of the test is also greatly improved. Materials researchers use such a large number of material preparations and automated tests to find the best material formula, quickly optimize material performance, and discover new mat...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/04C23C14/28C23C14/50C23C14/54
CPCC23C14/042C23C14/28C23C14/50C23C14/542C23C14/548
Inventor 张晓军
Owner SHENZHEN ARRAYED MATERIALS TECH CO LTD
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