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A high-speed detection method for three-dimensional topography of micro-nano structures based on structured light

A technology of micro-nano structure and three-dimensional topography, which is applied in the direction of measuring devices, optical devices, instruments, etc., can solve the problems of large errors, unfavorable detection, and low detection efficiency, and achieve good application prospects, high-speed and high-precision three-dimensional topography Detection effect

Active Publication Date: 2020-10-16
INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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Problems solved by technology

The three-dimensional shape detection technology based on structured light adopts the method of phase shift and vertical scanning to obtain the image modulation degree curve, which not only has low detection efficiency, complicated signal processing, but also has large errors, which is not conducive to detection.

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  • A high-speed detection method for three-dimensional topography of micro-nano structures based on structured light

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Embodiment Construction

[0017] The present invention will be further described in detail below in conjunction with the accompanying drawings and working principle.

[0018] The present invention is a high-speed detection method of three-dimensional shape of micro-nano structure based on structured light, such as figure 1 As shown, the white light source 1 emits 550nm white light, which is collimated by tube lens 1 2 and then irradiated onto the structured light projection device 3; the projected light is reflected to the microscope objective lens 8 through tube lens 2 4 and half mirror 7 The object 9 to be measured is irradiated to the surface of the object 9 to be measured; the object 9 to be measured is scanned horizontally under the action of the PZT scanning table 10, wherein the reflected light of the object to be measured 9 passes through the half mirror 7 and the tube lens 3 6 and is captured by the black and white CCD camera 5 collection. The sinusoidal grating fringes projected by the struc...

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Abstract

The invention is a high-speed detection method for three-dimensional topography of micro-nano structure based on structured light. Sinusoidal grating stripes projected by a structured light projectiondevice form an angle [theta] with optical axis, are then projected onto the surface of the object to be tested, and an image is acquired by a CCD camera. The acquired image is calculated through a Fourier transform filtering algorithm to obtain a modulation distribution of the sinusoidal grating on the surface of the object, so that a modulation curve of each pixel point at different horizontal scanning positions can be obtained. Finally, the topography recovery can be realized by extracting a position of the maximum value of the modulation. The high-speed detection method for the three-dimensional topography of the micro-nano structure based on the structured light can not only realize continuity measurement of the non-periodic micro-nano structure, but also retain advantages of verticalmeasurement, and has high detection precision and efficiency.

Description

technical field [0001] The invention belongs to the technical field of optical microscopic imaging and precision measurement, and in particular relates to a high-speed detection method for three-dimensional morphology of micro-nano structures based on structured light. Background technique [0002] In recent years, the application of micro-nano structures in the fields of microelectronics, biotechnology, aerospace, metamaterials and other technologies has developed rapidly, and has a great influence on social development and economic level. Sophisticated micro-nano structures will be the most important in the next period. A hotspot of technological development. The three-dimensional appearance of micro-nano devices is directly related to the performance characteristics, reliability and functional analysis of the product. High-precision and fast micro-nano detection methods and technologies are important means to obtain the three-dimensional appearance of micro-nano structure...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/24
CPCG01B11/24
Inventor 位浩杰唐燕谢忠业刘磊赵立新胡松
Owner INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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