MEMS Gyroscope with Overload Protection Mechanism

A micro-electromechanical gyroscope and overload protection technology, which is applied to gyroscope/steering sensing equipment, gyro effect for speed measurement, instruments, etc., can solve the problems of increased drive spring stress, secondary impact of the structure, and reduced device overload resistance. , to achieve the effect of improving stiffness and anti-overload capacity

Active Publication Date: 2022-03-18
CHENGDU CORPRO TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] When there is no displacement limiting structure in the driving direction, the above two methods will eventually cause the stress of the driving spring to increase when overloaded, resulting in fracture; Movement space, resulting in a more serious secondary impact problem between structures, which will also reduce the overload resistance of the device

Method used

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  • MEMS Gyroscope with Overload Protection Mechanism
  • MEMS Gyroscope with Overload Protection Mechanism
  • MEMS Gyroscope with Overload Protection Mechanism

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0059] Such as figure 1 As shown, the MEMS gyroscope with an overload protection mechanism includes a gyroscope body and a control block 3, and the gyroscope

[0060] The instrument body is provided with a limit slot 11, and the control block 3 is provided with a limit latch 311 adapted to the limit slot 11; when the gyroscope body is in working condition, the limit latch 311 and the limit The position slot 11 has no overlap (that is, the limit latch 311 is separated from the limit slot 11, and the limit latch 311 is located outside the limit slot 11); when the gyroscope body is in a non-working state, the limit latch 311 and the limit There is overlap in the position slot 11 (that is, a part of the structure of the limit latch 311 is located in the limit slot 11); There are gaps between the walls.

[0061] When the gyroscope body is in the non-working state, the limit latch 311 on the control block 3 overlaps with the limit groove 11 on the gyroscope body by a certain lengt...

Embodiment 2

[0063] On the basis of the first embodiment, this embodiment also includes: figure 1 As shown, the gyroscope body includes a driving mass 1, a gyroscope anchor point 12, a first comb tooth electrostatic driver 13, a second comb tooth electrostatic driver 14, a detection mass 2, a driving spring 15 and a detection spring 21, the driving The mass 1 is provided with a limiting groove 11, the gyroscope anchor point 12 is connected to the driving mass 1 via a driving spring 14, and the first comb tooth electrostatic driver 13 is used to drive the driving mass 1 along the first axis (y-axis ) forward movement, the second comb tooth electrostatic driver 14 is used to drive the driving mass 1 to move backward along the first axis (y-axis), and the detection mass 2 is connected to the driving mass 1 via a detection spring 21 .

[0064] exist figure 1 Among them, two gyroscope anchor points 12 are provided on the first side of the driving mass 1, and two gyroscope anchor points 12 are ...

Embodiment 3

[0069] On the basis of the first embodiment, this implementation also includes: figure 2 As shown, the control block 3 includes a control block mass 31, a deck 32, a control block anchor point 313 and a control block spring 314, the control block mass 31 is located between the driving mass 1 and the deck 32, and the control block The mass 31 is provided with a limit latch 311 and a buckle 312 adapted to the clamp 32 , and the control block anchor point 313 is connected to the control block mass 31 via a control block spring 314 .

[0070] The mass 31 of the control block is connected to the anchor point 313 of the control block through the spring 314 of the control block, so that the control block 3 and the gyroscope body remain relatively stationary in the non-working state.

[0071] When the gyroscope body is in the non-working state, a part of the structure of the limit latch 311 is located in the limit groove 11 (that is, the limit latch 311 overlaps with the limit groove...

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Abstract

The invention discloses a micro-electromechanical gyroscope with an overload protection mechanism, comprising: a gyroscope body provided with a limit slot; a control block provided with a limit latch adapted to the limit slot; the gyroscope body In the working state, the limit bolt does not overlap with the limit groove; when the gyroscope body is in a non-working state, the limit bolt and the limit groove overlap; the limit bolt and the limit groove overlap each other; When the grooves overlap, there is a gap between the limit latch and the side wall of the limit groove. In the present invention, when the gyroscope is not working, the limit latch on the control block and the limit groove on the driving mass have a certain overlapping length, and when the gyroscope is overloaded on the first axis, the range of motion of the driving mass will be limited. The limit of the bit latch, the limit value can be configured to be significantly smaller than the value of the drive displacement, so as to achieve the purpose of improving the anti-overload capability.

Description

technical field [0001] The invention relates to the technical field of microelectromechanical gyroscopes, in particular to a microelectromechanical gyroscope with an overload protection mechanism. Background technique [0002] MEMS gyroscopes are usually vibrating gyroscopes whose working principle is based on the Coriolis effect. When there is an input angular velocity, the detection mass will generate a certain displacement according to the movement speed of the driving mass, and the signal will be read out through a certain conversion method. Therefore, the performance of the gyroscope can be improved by increasing the displacement of the driving mass (that is, increasing the driving speed). [0003] The gyroscope may be overloaded in the form of falling or other forms when it is not working, especially in application scenarios such as smart ammunition that must have a large impact before starting to work. [0004] Without changing the signal processing circuit and proc...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01C19/5656G01C19/5649
CPCG01C19/5649G01C19/5656
Inventor 梁冰
Owner CHENGDU CORPRO TECH CO LTD
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