A method for extracting parameters of a piezoelectric multi-wafer equivalent circuit model
A technology of equivalent circuit model and parameter extraction, which is applied in electrical digital data processing, CAD circuit design, special data processing applications, etc.
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[0055] In order to make the purpose, technical solutions and advantages of the present invention more clear, the following will give a specific description of the implementation of the present invention in conjunction with examples. To test a piezoelectric multi-chip, the experimental determination method of 5 independent parameters is as follows: one end of the piezoelectric multi-chip is fixed on the vibration source, and the other end is free, and the amplitude of the sinusoidal vibration acceleration of 1g is kept constant, and different load resistances are obtained by scanning the vibration frequency R L The relationship curve between output voltage and vibration frequency of the piezoelectric multi-chip is shown below. Short circuit resonant frequency f sc =842Hz is the frequency value corresponding to the maximum output voltage when the load resistance is 50Ω (approximate short circuit); the open circuit resonant frequency f oc =870Hz is the frequency value correspon...
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