Membrane thickness monitoring device and membrane formation equipment

Abstract

The invention belongs to the technical field of display and in particular relates to a membrane thickness monitoring device and membrane formation equipment. The membrane thickness monitoring device comprises a membrane thickness synchronizing unit, wherein the membrane thickness synchronizing unit comprises a sensor and a shielding plate; a plurality of monitoring holes are formed in the shielding plate; the shielding plate is capable of being moved relative to the sensor to enable openings of at least two different monitoring holes to be aligned to the sensor, and then the quantity of a membrane formation material which passes through the monitoring holes and reaches the sensor within a set time is monitored; the sensor is a crystal oscillator. By adopting the membrane thickness monitoring device, on premise that the membrane thickness monitoring accuracy is ensured, the service life of the crystal oscillator is prolonged, and the use efficiency of the crystal oscillator is improved;by adopting the membrane formation equipment, a tool coefficient value matched with an opening radius of the monitoring holes in the shielding plate in the membrane thickness monitoring device is selected, a material on the crystal oscillator is not settled too rapidly or too slowly, a stable membrane formation velocity is maintained, and accurate membrane thickness monitoring can be achieved.

Description

technical field [0001] The invention belongs to the field of display technology, and in particular relates to a film thickness monitoring device and film forming equipment. Background technique [0002] OLED (Organic Light-Emitting Diode: organic light-emitting diode) compared with LCD (Liquid Crystal Display: liquid crystal display device), has a wide color gamut, fast response, wide viewing angle, foldable and other advantages, so it attracts many manufacturers to invest a lot of money develop it. At present, some display products and lighting products on the market have adopted OLED technology, which is likely to replace LCD and become the next-generation mainstream display. [0003] At present, the manufacturing process of OLED devices is mainly thermal evaporation (Evaporation), that is, the layer structure material is heated at high temperature, and the thickness of the layer structure material is monitored at the same time, so as to form the layer structure of the OL...

AI Technical Summary

Problems solved by technology

With the increase of the deposition quality of the layer structure material on the crystal oscillator, the vibration frequency of the crystal oscillator will decrease, resulting in a large error in film thickness monitoring

After the service life of the crystal oscillator expires, the cavity needs to be opened for replacement, which affects the production progress

Too fast material deposition on the crystal oscillator will shorten the service life of the crystal oscillator (Lifetime), and too slow will cause large rate fluctuations, resulting in inaccurate film thickness monitoring, resulting in difficult to reconcile contradictions

Images