Cutting apparatus

Abstract

The invention provides a cutting apparatus which can effectively photograph a cutting groove formed in a processed object. The cutting apparatus (1) can measure the groove width of the cutting groove(G) it forms the high pressure air layer (100) and it blows and it blows the cutter water remaining in the upper side (Wa) or the cutting groove (G) of the plate shape (W) with the whirlpool airstream (101) and therefore more correct including the air layer formation means (33), is one circularity air around the optical axis of the objective lens (310) (34) the imaging device (30) taking a picture of the plate shape (W) which maintains with the sustaining table (10) this is included, the objective lens (310) in the imaging time, of the cutting groove (G) the air introducing hole (35) introducing air to (34) to the circularity air, the guide plate (36), and the reverse transfer phase cone fluid path (37) are included, and the whirlpool airstream (101) among the plate shape (W). As to the guide plate (36), air is swiveled in a specific direction to the circularity air in (34) and creating the whirlpool airstream. The reverse transfer phase cone fluid path (37) is axlediameter measured to the downward to the circularity air from (34).

Description

technical field [0001] The present invention relates to a cutting device for cutting a workpiece. Background technique [0002] A cutting device that cuts a workpiece includes at least: a holding table that holds the workpiece; a cutting unit that cuts the workpiece held on the holding table; and an imaging camera (microscope) that photographs the workpiece. The processed surface of the object. The imaging camera is housed in the case to prevent the cutting water and machining chips used in the cutting process from adhering. An opening for shooting is formed at the bottom of the casing, and an openable and closable shutter is attached to the opening. When photographing a workpiece, the shutter is opened to open the aperture. Then, when the workpiece is not photographed, the opening is closed by shielding the opening with a shutter, thereby preventing droplets (water droplets) of cutting water used in the cutting process from adhering to the objective lens of the imaging c...

AI Technical Summary

Problems solved by technology

[0008] However, there is a problem that, since the ejection of air has directionality, when there are droplets of cutting water around the direction in which the air is ejected, the droplets are drawn into the ejection direction of the air, although they are directed toward the workpiece. Air is ejected, but fine water droplets also adhere to the upper surface of the workpiece

In the past, the cutting process was temporarily stopped, and the cutting position and the width of the cutting groove (debris on both sides of the cutting groove) were inspected by taking pictures with a video camera. However, when fine water droplets adhered to the upper surface of the workpiece, it was impossible to To accurately measure the groove width of the cutting groove, it is necessary to dry the upper surface of the workpiece

Images