A transport steering device for semiconductor and pan-semiconductor substrates
A steering device and semiconductor technology, which is applied in the field of semiconductors and pan-semiconductors, can solve problems such as collisions, easy deviation or slipping, and surface damage, and achieve the effects of protecting the safety of the substrate, avoiding surface wear, and ensuring processing quality
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[0023] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0024] see Figure 1-3 , the present invention provides a technical solution: a semiconductor and pan-semiconductor substrate transportation steering device, including a bottom box 1, the middle position of the inner cavity bottom of the bottom box 1 is rotatably connected with a rotating shaft 2, and the outer surface of the rotating shaft 2 is located in the bottom box 1 The position close to the top of the chamber is fixedly connected with the driven wheel ...
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