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Grinding tool and method of fabricating the same

A technology for grinding tools and manufacturing methods, which is applied in the direction of grinding tools, manufacturing tools, abrasives, etc., and can solve the problems of falling of abrasive particles 11, damage of the surface of the grinding pad, and unstable fixing method, and achieves the characteristics of not easy to fall off, strong rigidity, and fixed The effect of high stability

Active Publication Date: 2018-12-18
KINIK
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  • Abstract
  • Description
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  • Application Information

AI Technical Summary

Problems solved by technology

However, this fixing method of only using adhesive or resin 12 to fix the abrasive particles 11 is not stable. During the use of the dresser 1, the adhesive or resin 12 is often caused by factors such as acidic corrosion of the abrasive liquid, which often causes the abrasive particles 11 to fall off. severe damage to the surface of the polishing pad

Method used

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  • Grinding tool and method of fabricating the same
  • Grinding tool and method of fabricating the same
  • Grinding tool and method of fabricating the same

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Embodiment Construction

[0022] image 3 A top view of the grinding tool 2 provided by an embodiment of the present invention is shown, Figure 4 A cross-sectional view of the grinding tool 2 is then shown. refer to image 3 and Figure 4 , the abrasive tool 2 includes a substrate 21 and a plurality of abrasive particles 22 fixed on the substrate 21 . The substrate 21 is an integrally formed rigid single body. The material of the substrate 21 is a material with strong rigidity and stable chemical activity, such as a stainless steel substrate, a ceramic substrate, etc. Here, the stainless steel substrate is taken as an example, so that the substrate 21 can be slowed down in the process of using the grinding tool 2. Adverse effects of factors such as chemical activity. The size of the substrate 21 is not limited, it is 4 inches in this example, and its thickness can be 2-3 mm. The opposite sides of the substrate 21 have two surfaces 211, 212 respectively, wherein, the surface 211 is the working su...

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Abstract

A grinding tool and a method of fabricating the same are disclosed. A grinding tool includes a substrate and a plurality of abrasive particles. The substrate has a first and a second surface and a plurality of holes, each of the holes extending through the substrate and respectively having a first and a second opening on the first and second surface, the second opening being larger than the firstopening. The abrasive particles are respectively disposed in the holes and attached to the substrate via a plurality of adhesive portions, each of the abrasive particles having a tip protruding outward from the first surface and a remaining part covered with one of the adhesive portions inside the corresponding hole, wherein the first openings of the holes are smaller than the abrasive particles,and the abrasive particles are respectively retained in the holes.

Description

technical field [0001] The present invention relates to a grinding tool, and in particular to a grinding tool with a plurality of through holes formed in a substrate for arranging grinding particles and a manufacturing method thereof. Background technique [0002] Abrasive tools have been widely used in various applications such as cutting, grinding, polishing and buffing of materials. In the stone processing industry or precision grinding industry, the efficiency of cutting, grinding and other processing procedures can be improved through the excellent wear resistance of hard abrasive particles, and the cost of such processing industries can be reduced. [0003] Chemical Mechanical Polishing (CMP) is the most common grinding process in various industries. CMP is used to make surfaces that can grind a variety of items, including ceramic, silicon, glass, quartz, or metal chips. In addition, with the rapid development of integrated circuits, CMP is one of the common wafer pl...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B24B37/11B24D7/06
CPCB24B37/11B24D7/06B24D3/06B24D3/14B24D18/0072B24D2203/00B24B53/017
Inventor 周瑞麟廖懿造杨宗谕
Owner KINIK
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