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Strong-absorption optothermal detector and preparation method thereof

A photothermal detection and detector technology, applied in the field of detectors, can solve the problems of weak light absorption capacity of photothermal detectors, and achieve the effects of improving photothermal detection accuracy, sensitivity and absorption capacity.

Inactive Publication Date: 2018-11-30
安徽唯诗杨信息科技有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] In order to solve the problem of weak light absorption ability of the photothermal detector in the prior art, the embodiment of the present application provides a strong absorption photothermal detector and its preparation method. The structure of the photothermal detector in the embodiment of the present application is simple, The design is ingenious. By adopting the technical means of setting multiple micro-holes on the heat-sensitive line and then evaporating a layer of precious metal particles, the surface of the heat-sensitive line and the inner wall surface of the micro-holes are attached to the technical means of precious metal particles, which enhances the local surface of the photothermal detection structure, etc. Resonance of excitons improves the absorption of incident light, so as to achieve the effect of improving the detection accuracy of photothermal detectors

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  • Strong-absorption optothermal detector and preparation method thereof
  • Strong-absorption optothermal detector and preparation method thereof
  • Strong-absorption optothermal detector and preparation method thereof

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Embodiment 1

[0025] Such as figure 1 Shown is a strong absorption photothermal detector in this embodiment, which is composed of a base layer 1, a photothermal detection structure 3, a first electrode 41 and a second electrode 42, and the photothermal detection structure 3 covers the base layer 1. The first electrode 41 and the second electrode 42 are respectively connected to two sides of the photothermal detector.

[0026] Specifically: the base layer 1 of this embodiment is preferably ITO glass, which has excellent photoelectric properties, strong electrical conductivity and high light transmittance. When the incident light hits the photothermal detection structure 3, the light signal is converted into an electrical signal, and then the external circuit is connected through the first electrode 41 and the second electrode 42, and the telecommunication is output to the display device. purpose of heat detection.

[0027] In this embodiment, the photothermal detection structure 3 includes...

Embodiment 2

[0035] Based on the strong absorption photothermal detector disclosed in Example 1, this embodiment discloses a preparation method of a strong absorption photothermal detector, including the following steps:

[0036] Step 1, preparing the base layer 1, and evaporating silicon dioxide on the base layer 1 by electron beam evaporation to form a dielectric layer 2;

[0037] Step 2, vapor-depositing silicon germanium on the dielectric layer 2 formed in step 1 by physical vapor deposition to form heat sensitive lines 31;

[0038] Step 3, using a pattern generator to design the shape of the microhole 32, and then using focused ion beam technology to etch the microhole 32 on the thermally sensitive line 31 formed in step 2;

[0039] Step 4. Evaporate noble metal particles on the heat-sensitive wire 31 containing micropores 32 prepared in step 3 by electron beam evaporation, and form a layer of noble metal particle layer 33 on the surface of the heat-sensitive wire 31 and the surface o...

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Abstract

The invention relates to the technical field of detectors, in particular to a strong-absorption optothermal detector and a preparation method thereof. The optothermal detector is constituted by a substrate layer, an optothermal detecting structure, a first electrode and a second electrode. The substrate layer is covered with the optothermal detecting structure, and the first electrode and the second electrode are connected to the two sides of the optothermal detector correspondingly. The optothermal detecting structure comprises a thermal-sensitive line, a plurality of micro holes are formed in the upper surface of the thermal-sensitive line, a noble metal particle layer adheres to each of the surface of the thermal-sensitive line and the surfaces of the inner walls of the micro holes to increase the acting area of incident light and the noble metal particle layers so as to increase absorption of the incident light, and thus stronger surface plasmon resonance is caused to form broadband absorption. The micro holes are made of thermal-sensitive materials, heat absorbed by the optothermal detecting structure is transmitted more advantageously, the detecting sensitivity is improved advantageously, the optothermal detecting precision is improved advantageously, and the application range is enlarged advantageously.

Description

technical field [0001] The invention belongs to the technical field of detectors, and in particular relates to a strong absorption photothermal detector and a preparation method thereof. Background technique [0002] Photothermal detectors are widely used in various industries because of their simple preparation and ease of use, mainly by converting the optical signal of incident light into thermal energy, and then converting the thermal energy into electrical signal, and then using the electrical signal to represent the optical signal. In the process of converting light signal into heat energy, the absorption of light is a very important step, but the light absorption ability of traditional photothermal detectors is relatively weak, and the precision of photothermal detection is relatively low. Contents of the invention [0003] In order to solve the problem of weak light absorption ability of the photothermal detector in the prior art, the embodiment of the present appli...

Claims

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Application Information

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IPC IPC(8): H01L31/09H01L31/18
CPCH01L31/09H01L31/18Y02P70/50
Inventor 刘翡琼
Owner 安徽唯诗杨信息科技有限公司
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