Detection method for position of crystal oscillating sheet in evaporation device, evaporation method and related device

Abstract

The invention discloses a detection method for the position of a crystal oscillating sheet in an evaporation device, an evaporation method and a related device. At least two metal electrode plates unparallel to each other and the crystal oscillating sheet located at the center of a detection hole form a capacitor; when the crystal oscillating sheet works, a capacitance value of the capacitor is detected in real time; if the position of the crystal oscillating sheet relative to the detection hole is abnormal can be confirmed according to the detected capacitance value of the capacitor; an abnormal crystal oscillating sheet is replaced if the position is abnormal. In the process of material evaporation, the position information of the crystal oscillating sheet can be monitored in real time in a manner of detecting the capacitance value of the capacitor formed by the crystal oscillating sheet and the metal electrode plates, so that the crystal oscillating sheet on abnormal position can bereplaced in time, the abnormal fluctuation of evaporation rate caused by the crystal oscillating sheet deviated from the center of the detection hole can be avoided and the productivity and the product yield can be promoted.

Description

technical field [0001] The invention relates to the field of display technology, in particular to a method for detecting the position of a crystal oscillator in an evaporation device, an evaporation method and a related device. Background technique [0002] In the production line of organic electroluminescent display panels (OLED, Organic Light-Emitting Diode), the crystal oscillator in the evaporation equipment is used to monitor the evaporation rate in real time, so as to ensure that the film thickness of each organic layer is controlled within the error range (Spec) Inside. During the working process of the crystal oscillator, due to the vibration of the crystal oscillator itself or the abnormal rotation of the motor, the crystal oscillator deviates from the center of the detection hole, causing abnormal fluctuations in the evaporation rate, which not only affects the production capacity, but also reduces the product yield in severe cases. [0003] Therefore, how to moni...

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Problems solved by technology

During the working process of the crystal oscillator, due to the vibration of the crystal oscillator itself or the abnormal rotation of the motor, the crystal oscillator deviates from the center of the detection hole, causing abnormal fluctuations in the evaporation rate from time to time, which not only affects the production capacity, but also reduces the yield of the product in severe cases

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