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Micro-thrust measuring device that employs silicon torsion spring

A measuring device and micro-thrust technology, which are applied in measuring devices, force/torque/work measuring instruments, and force measurement by measuring the change of optical properties of materials when they are stressed, which can solve the difficulty of calibration and the influence of friction force measurement accuracy. and other problems, to achieve the effect of high sensitivity and simple and easy calibration method

Active Publication Date: 2018-11-16
BEIJING UNIV OF TECH
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Problems solved by technology

[0003] The purpose of the present invention is to overcome the disadvantages of the extra torque generated by the lead wire, the impact of friction on the measurement accuracy and the difficulty of calibration in the existing measurement method, and proposes to use silicon micromachining technology to make a silicon torsion spring measuring device

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  • Micro-thrust measuring device that employs silicon torsion spring
  • Micro-thrust measuring device that employs silicon torsion spring
  • Micro-thrust measuring device that employs silicon torsion spring

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Embodiment Construction

[0036] The principles and features of the present invention will be described below with reference to the accompanying drawings. The examples are only used to explain the present invention, but not to limit the scope of the present invention.

[0037] The silicon torsion spring in the present invention can be made from a silicon wafer by a wet etching method, and the specific process flow is as follows:

[0038] (a) Attached Figure 7 , cleaning the silicon wafer 22, and drying;

[0039] (b) Attached Figure 8 , oxidized at a furnace temperature of 1000 ° C for about 20 minutes, and oxidized a layer of silicon dioxide 23 on the surface of the silicon wafer 22;

[0040] (c) Attached Figure 9 , deposit a layer of silicon nitride 24 of about 0.6 μm-0.8 μm on the surface of silicon dioxide 23;

[0041] (d) Attached Figure 10 , preheating the silicon wafer 22 at 200°C for 20min, then spin-coating a positive photoresist 25 with a thickness of about 2μm-3μm, and pre-baking at ...

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Abstract

The invention relates to a micro-thrust measuring device that employs a silicon torsion spring, and specifically relates to a silicon torsion spring formed by a silicon micromachining technology; thesilicon torsion spring and an optical path can amplify the micro thrust displacement of a micro propeller, thus measuring micro thrust with high sensitivity; the micro-thrust measuring device can directly measure and evaluate the thrust performance of the micro propeller, thus providing important effects in micro propeller research and development and assessment. In addition, in some emerging fields, such as space satellite control technology, biomechanics, microrobot and bionics, have higher and higher requirements on the thrust measuring technology in a micro N level, Nano N level and even smaller level. The micro-thrust measuring device belongs to the aviation, spaceflight, micro force measurement, micro propulsion technology and micro mechanical fields.

Description

technical field [0001] The invention is a micro-thrust measuring device using a silicon torsion spring, specifically a silicon torsion spring made by a silicon micro-machining process, and the micro-thrust displacement of the micro-propeller is amplified by using the silicon torsion spring and an optical path, so as to realize Highly sensitive measurement of tiny thrusts. The micro-thrust measuring device can directly measure and evaluate the thrust performance of the micro-thrust, and plays an important role in the development and evaluation of the micro-thrust. In addition, in some emerging fields, including space satellite control technology, biomechanics, micro-robots and bionics, there are also higher and higher requirements for the thrust measurement technology of microbull, nanobull and smaller forces. The present invention belongs to aviation , aerospace, micro-force measurement, micro-propulsion technology and micro-mechanics. Background technique [0002] At pres...

Claims

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Application Information

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IPC IPC(8): G01L5/00G01L5/12G01L1/24
CPCG01L1/24G01L5/0038G01L5/12
Inventor 刘本东李心蕊杨旭贤光郭宇杨佳慧
Owner BEIJING UNIV OF TECH
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