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Performance testing method for pressure sensor

A pressure sensor and testing method technology, applied in the direction of measuring fluid pressure, instruments, measuring devices, etc., can solve the problems of inaccurate and bad pressure testing, and achieve the effects of not affecting production efficiency, simple process logic, and fast testing speed.

Inactive Publication Date: 2018-10-30
WEIFANG GOERTEK MICROELECTRONICS CO LTD
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AI Technical Summary

Problems solved by technology

[0004] In view of the above problems, the purpose of the present invention is to provide a pressure sensor performance testing method to solve the problem of inaccurate pressure testing due to the poor pressure chip of the pressure sensor

Method used

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  • Performance testing method for pressure sensor
  • Performance testing method for pressure sensor

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no. 2 example

[0057] The second embodiment: After the pressure sensor is depressurized first, then the pressure is increased to the 85kPa pressure point for testing, so as to compare whether the pressure values ​​of the two tests are the same, as long as the error of the tested pressure values ​​is within ± 40Pa, then It is judged that the absolute pressure accuracy of the pressure sensor is qualified after the buck-boost test.

[0058] In the above two test processes, no matter which test method is selected, the buck-boost test can be performed. According to the convenience in practical application, any one of the above two embodiments can be selected arbitrarily.

[0059] It can be seen from the above embodiments that the performance testing method of the pressure sensor provided by the present invention tests the pressure sensor to be tested by combining the single-point test and the buck-boost test, so as to test out unqualified products. The performance test method of this pressure sen...

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Abstract

The invention provides a performance testing method for a pressure sensor. The method comprises the steps that the temperature and pressure in a sealing testing cavity body are controlled to conduct asingle-point test on a to-be-tested pressure sensor placed in the sealing testing cavity body, and it is determined whether or not the absolute pressure precision of the to-be-tested pressure sensoris qualified; at a preset temperature in the sealing testing cavity body, a buck-boost test of a preset pressure point is conducted on the to-be-tested pressure sensor with the qualified absolute pressure precision after the single-point test, and it is determined whether or not the absolute pressure precision of the to-be-tested pressure sensor is qualified after the buck-boost test. By utilizingthe method, the problem that a poor pressure chip of the pressure sensor causes an inaccurate pressure test can be solved.

Description

technical field [0001] The present invention relates to the technical field of pressure sensors, and more specifically, to a performance testing method of pressure sensors. Background technique [0002] With the advancement of technology, pressure sensor products have been widely used in drones, mobile phones and smart wearables. Among them, absolute pressure accuracy has become an important indicator for pressure sensor performance testing. But now the pressure sensor only uses single-point air pressure test. During the production process, it is found that due to the difference in the performance of the air pressure chip, the pressure value of the same pressure point test after the pressure sensor has undergone a step-up and down step has a large deviation. If the defective product flows out In the end, it will lead to inaccurate air pressure testing of terminal products such as drones and mobile phones, which will affect customer use; and at this stage, the air pressure ch...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L27/00
CPCG01L27/00
Inventor 孙振国
Owner WEIFANG GOERTEK MICROELECTRONICS CO LTD
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