Reaction chamber
A reaction chamber and cavity technology, applied in the field of reaction chambers, can solve the problems of shortening the service life of the first sealing ring 10 and the second sealing ring 13, so as to reduce the quantity, reduce the risk of metal contamination, and improve the service life Effect
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment Construction
[0057] In order to enable those skilled in the art to better understand the technical solution of the present invention, the reaction chamber provided by the present invention will be described in detail below with reference to the accompanying drawings.
[0058] Figure 4A A cross-sectional view of the reaction chamber provided by the first embodiment of the present invention. Figure 4B for Figure 4A Enlarged view of region A in the middle. Figure 4C for Figure 4A Enlarged view of region B in the middle. Please also refer to Figure 4A ~ Figure 4B , the reaction chamber includes a chamber 21 , an adjustment bracket 25 and a dielectric window 29 arranged in sequence from bottom to top, wherein a base 32 is provided inside the chamber 21 for carrying a wafer 33 . A gas inlet nozzle 31 is provided in the dielectric window 29 to deliver the process gas to the inside of the cavity 21, and a radio frequency coil 30 is provided above the dielectric window 29 to excite the p...
PUM
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com