Mask plate

A technology of mask and mask, which is applied in the field of mask, and can solve the problems of mask stretching and folding

Active Publication Date: 2018-10-02
KUNSHAN GO VISIONOX OPTO ELECTRONICS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] Based on this, the present invention provides a mask, which solves the problem of wrinkles when the...

Method used

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Embodiment Construction

[0027] In order to facilitate the understanding of the present invention, the present invention will be described more fully below with reference to the relevant drawings. The preferred embodiments of the invention are shown in the drawings. However, the present invention can be implemented in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to make the understanding of the disclosure of the present invention more thorough and comprehensive.

[0028] It should be noted that when an element is referred to as being "fixed to" another element, it may be directly on the other element or a central element may also exist. When an element is considered to be "connected" to another element, it can be directly connected to the other element or an intermediate element may be present at the same time. The terms "vertical", "horizontal", "left", "right" and similar expressions used herein are for ill...

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Abstract

The invention relates to a mask plate. The mask plate comprises a mask plate body and at least one child mask plate on the mask plate body. Each child mask plate comprises an evaporation area and a first shielding area, wherein a plurality of evaporation holes are formed in the evaporation area in a penetrating mode in the thickness direction of the child mask plate; the depth of the evaporation holes is the same as the thickness of the mask plate body; at least one deformation hole is formed in the first shielding area in a penetrating mode; the depth of the deformation holes is the same as the thickness of the mask plate body; the size of the deformation holes in the net opening direction of the mask plate is larger than that of the evaporation holes in the net opening direction of the mask plate; at least one transition groove is formed in a second shielding area; and the depth of the transition grooves is smaller than the thickness of the mask plate body. According to the mask plate, the tensile strength of the first shielding areas in the net opening direction of the mask plate is smaller than that of the evaporation areas in the net opening direction, and the deformation of the middle areas of the evaporation areas under the tension action is effectively reduced.

Description

Technical field [0001] The invention relates to the field of display technology, in particular to a mask. Background technique [0002] Organic Light-Emitting Diode (OLED), also known as organic electro-laser display or organic light-emitting semiconductor, has low driving voltage, active light emission, wide viewing angle, high efficiency, fast response speed, and easy to achieve full-color large-area wall-mounted Because of the many characteristics of display and flexible display, it gradually replaces the liquid crystal display (LCD) display and is widely used in display terminals such as mobile phones, computers, and televisions. [0003] In the OLED manufacturing technology, a mask used for vacuum evaporation is a vital component. The mask is used to control the position of the organic material deposited on the substrate, thereby forming organic patterns of different shapes on the substrate. Masks mainly include common metal masks (Common Metal Mask, CMM) and fine metal masks...

Claims

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Application Information

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IPC IPC(8): C23C14/04C23C14/12C23C14/24
CPCC23C14/042C23C14/12C23C14/24
Inventor 李文星
Owner KUNSHAN GO VISIONOX OPTO ELECTRONICS CO LTD
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