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Aerodynamic lens focusing particle beam width and divergence angle detection device

A technology of aerodynamics and detection devices, which is applied in the direction of measuring devices, optical instrument testing, and optical performance testing, and can solve problems such as low detection efficiency, high cost, and inaccurate detection results

Pending Publication Date: 2018-09-25
GUANGZHOU HEXIN INSTR CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The current detection method will have the problem that the current signal and the mass spectrum signal are greatly disturbed, and the detection result is inaccurate.
Existing detection methods also require specialized high-end experimental instruments, which are expensive, difficult to operate and maintain, and low detection efficiency

Method used

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  • Aerodynamic lens focusing particle beam width and divergence angle detection device

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Embodiment Construction

[0023] In order to facilitate the understanding of the present invention, the present invention will be described more fully below with reference to the associated drawings. Preferred embodiments of the invention are shown in the accompanying drawings. However, the present invention can be embodied in many different forms and is not limited to the embodiments described herein. On the contrary, these embodiments are provided to make the understanding of the disclosure of the present invention more thorough and comprehensive.

[0024] It should be noted that when an element is referred to as being “fixed” to another element, it can be directly on the other element or there can also be an intervening element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or intervening elements may also be present.

[0025] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as...

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Abstract

The invention discloses an aerodynamic lens focusing particle beam width and divergence angle detection device. The device comprises a detector, a stop valve, a molecular pump, a detection part, a light emitting part, a first target plate and a second target plate. The detector comprises a detection cavity and an installation opening communicating with the detection cavity. The installation opening is used for installation of a to-be-detected aerodynamic lens. One end of the aerodynamic lens communicates with the detection cavity and the other end communicates with an aerosol generator. The stop valve is arranged on a sample charging pipe of the aerodynamic lens. The molecular pump is connected to the exterior of the detector and communicates with the detector. The first target plate and the second target plate are sequentially arranged in the detection cavity and the first target plate is close to the installation opening. Vacuum grease layers are arranged on the first target plate and the second target plate. The detection part and the light emitting part are connected to the detector and installed between the installation opening and the first target plate. According to the invention, detection results are precise; cost is low; and operation and maintenance are simple.

Description

technical field [0001] The invention relates to the field of lens performance detection, in particular to an aerodynamic lens focusing particle beam width and divergence angle detection device. Background technique [0002] At present, the occlusion particle method is usually used in the world to test the performance of the empty lens, that is, a occluder is used to block the particle transmission path under the outlet of the empty lens. This method uses the current signal or the mass spectrum signal to indicate the beam width. The current detection method will have the problem that the current signal and the mass spectrum signal are greatly disturbed, and the detection result is inaccurate. Existing detection methods also require specialized high-end experimental instruments, which are expensive, difficult to operate and maintain, and low in detection efficiency. Contents of the invention [0003] Based on this, it is necessary to provide an aerodynamic lens focusing par...

Claims

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Application Information

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IPC IPC(8): G01M11/02
CPCG01M11/02G01M11/0214
Inventor 李磊代新刘浩友朱星高喻佳俊黄正旭高伟周振
Owner GUANGZHOU HEXIN INSTR CO LTD
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