Two-dimensional precision actuation platform and method based on double-arc inverse deflection electric actuation components

Abstract

The invention discloses a two-dimensional precise actuation platform based on double-arc reverse flexoelectric actuation components and a method. The actuation platform comprises a group of double-arcflexoelectric drive structures placed in the x-axis direction, a group of double-arc flexoelectric drive structures placed in the y-axis direction, an output platform, an outer frame for fixing the drive structures and a dust cover, wherein the flexoelectric drive structures are double-arc curved structures which are made of flexoelectric materials and concave at upper and lower ends, two pairs of electrodes are laid on double-arc upper and lower surfaces respectively and bilaterally symmetrical about double-arc middle surfaces, and the double-arc structures can be used as flexible guide rails to guarantee output reliability. Due to the unique type and electrode laying method, the flexoelectric drive structures can realize deflection at different angles and output of linear displacement according to different applied voltage. Drive components and structure components are integrated, so that multiple load and displacement output schemes are provided while the reverse flexoelectric effect is realzied. Meanwhile, the actuation platform has the characteristics of simple structure, small size and light weight.

Description

technical field [0001] The invention relates to a two-dimensional precision actuation platform, in particular to a two-dimensional precision actuation platform and method based on double-arc inverse deflection electric actuation components. Background technique [0002] Two-dimensional precision motion platforms are widely used in satellite pointing, laser communication, microscopic material engineering and other fields. At present, most two-dimensional precision motion platforms use piezoelectric materials with good micro-displacement output characteristics as output components, but Piezoelectric materials have a Curie temperature, the polarization effect will decay with time, and the highest displacement output level is at the sub-nanometer level, which limits the precision of the actuator output to a certain extent. The inverse flexoelectric effect is a structural strain caused by an electric field gradient, which exists in almost all dielectric materials, does not requir...

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Problems solved by technology

[0002] Two-dimensional precision motion platforms are widely used in satellite pointing, laser communication, microscopic material engineering and other fields. At present, most two-dimensional precision motion platforms use piezoelectric materials with good micro-displacement output characteristics as output components, but Piezoelectric materials have a Curie temperature, the polarization effect will decay with time, and the highest displacement output level is at the sub-nanometer level, which limits the precision of the actuator output to a certain extent.

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