Electric injection annealing device

Abstract

The invention relates to an electric injection annealing device, applied to annealing of a battery piece. The electric injection annealing device comprises a frame main body, wherein a roller conveying system is arranged at the bottom of the frame main body, and a carrier for carrying the battery piece sequentially passes through a feeding station, a reverse current injection station, a cooling station and a blanking station through the conveying roller system to perform annealing treatment; the reverse current injection station is used for performing electric injection on the battery piece inthe carrier, at least two process chambers are arranged in the reverse current injection station, including at least one high-temperature process chamber and at least one low-temperature process chamber, and a heat control system is arranged in the reverse current injection station and is used for adjusting the chamber temperature of the at least one high-temperature process chamber and the at least one low-temperature process chamber. According to the scheme of the invention, the annealing of the battery piece under the condition of electric injection can be realized, the high processing efficiency can be achieved, and the conversion efficiency of the battery piece can be effectively improved.

Description

technical field [0001] The invention relates to the technical field of cell sheet processing, in particular to a device for annealing a cell sheet, in particular to an electric injection annealing device. Background technique [0002] The silicon wafer (battery) contains oxygen, which has the function of absorbing impurities. Annealing the silicon wafer can promote the outward diffusion of oxygen remaining in the silicon, forming a low-oxygen environment (clean area) on the surface of the silicon wafer, thereby Reducing or even eliminating crystal defects caused by oxygen is beneficial to later device manufacturing, and annealing of silicon wafers can affect its resistivity and minority carrier lifetime. In addition, light-induced degradation (LID) refers to the power attenuation phenomenon caused by solar cells and components during the illumination process. In order to improve battery efficiency, PERC (passivated emitter and back local contact cell) high-efficiency batter...

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Problems solved by technology

[0003] In response to the above defects, annealing treatment is mostly used now, but it is found that if the silicon wafer is kept in an electrified state during the annealing process, the annealing effect of the silicon wafer can be better, and it has more superior performance, but there is no silicon wafer annealing equipment currently Therefore, a reliable working silicon wafer annealing equipment is urgently needed to solve this problem.

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