Beam adaptive correction device and correction electrode plate

Abstract

The invention discloses a beam current adaptive correction device and a correction electrode plate. The correction device comprises: two oppositely disposed correction electrode plates. The correctionelectrode plate comprises: an insulating substrate; a correction electrode array distributed on the insulating substrate and including a plurality of correction electrodes connected in series via resistors; a blowing electrode array comprising a plurality of blowing electrodes distributed between the correction electrodes, wherein positive and negative voltages can be applied to the plurality ofblowing electrodes to form positive and negative electric fields arranged in space; and a grounding electrode array including a plurality of grounding electrodes distributed between the blowing electrodes and the correction electrodes. The correction device can maintain an emitted charged particle beam in a constant emitting direction without varying with the trajectory of an incident charged particle beam, achieves adaptive correction compensation, and is not subject to device geometric accuracy, power supply system stability and sensitivity.

Description

Technical field [0001] The present disclosure belongs to the technical field of beam current correction, and relates to a beam current adaptive correction device and a correction electrode plate. Background technique [0002] Charged particle beams inevitably have the phenomenon of electromagnetic parameter drift during the transport process, and beam current correction technology is an indispensable means to compensate for the electromagnetic parameter drift of charged particle beams during the transport process. The flow is stable in the phase space. The usual beam correction devices mostly use electrostatic deflection plates or correction magnets, with a stable power supply system, to fine-tune the drift amount, so that the beam can move along the set direction after leaving the correction device. [0003] Existing beam current correction devices mainly use electric or magnetic fields to adjust the direction of the beam, and the correction amount is usually optimally determined...

AI Technical Summary

Problems solved by technology

However, when the incident beam fluctuates, that is, when the incident trajectory of the charged particle beam changes, the electromagnetic field in the device cannot adaptively ensure that the direction of the outgoing beam is constant according to the real-time incident trajectory of the beam.

On the other hand, the existing beam correction device itself will introduce new uncertain factors, so that the correction accuracy is limited by the geometric structure accuracy of the device itself, the stability and sensitivity of the power supply system, etc.

Images