Beam current adaptive correction device and correction electrode plate

Abstract

The invention discloses a beam current adaptive correction device and a correction electrode plate. The correction device comprises: two oppositely disposed correction electrode plates. The correctionelectrode plate comprises: an insulating substrate; a correction electrode array distributed on the insulating substrate and including a plurality of correction electrodes connected in series via resistors; a blowing electrode array comprising a plurality of blowing electrodes distributed between the correction electrodes, wherein positive and negative voltages can be applied to the plurality ofblowing electrodes to form positive and negative electric fields arranged in space; and a grounding electrode array including a plurality of grounding electrodes distributed between the blowing electrodes and the correction electrodes. The correction device can maintain an emitted charged particle beam in a constant emitting direction without varying with the trajectory of an incident charged particle beam, achieves adaptive correction compensation, and is not subject to device geometric accuracy, power supply system stability and sensitivity.

Description

technical field [0001] The disclosure belongs to the technical field of beam current correction, and relates to a beam current self-adaptive correction device and a correction electrode plate. Background technique [0002] Electromagnetic parameter drift is unavoidable during the transport of charged particle beams, and beam correction technology is an indispensable means to compensate for the drift of electromagnetic parameters during the transport of charged particle beams. The flow is distributed stably in phase space. Common beam correction devices use electrostatic deflection plates or correction magnets, combined with a stable power supply system, to finely correct and compensate the drift, so that the beam can move forward along the set direction after leaving the correction device. [0003] Existing beam correction devices mainly use electric or magnetic fields to adjust the direction of the beam. The correction amount is usually optimized and determined in the beam...

AI Technical Summary

Problems solved by technology

However, when the incident beam fluctuates, that is, when the incident trajectory of the charged particle beam changes, the electromagnetic field in the device cannot adaptively ensure that the direction of the outgoing beam is constant according to the real-time incident trajectory of the beam.

On the other hand, the existing beam correction device itself will introduce new uncertain factors, so that the correction accuracy is limited by the geometric structure accuracy of the device itself, the stability and sensitivity of the power supply system, etc.

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