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Method for inducing defect annealing based on ionization irradiation

A technology of ionizing radiation and displacement, applied in the manufacture of circuits, electrical components, semiconductors/solid-state devices, etc., can solve problems such as device displacement damage, and achieve the effects of easy operation, cost reduction, and simple steps

Active Publication Date: 2018-07-31
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] The purpose of the present invention is to solve the problem that particle radiation can cause displacement damage to devices, and to provide a method for annealing induced displacement defects based on ionizing radiation

Method used

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  • Method for inducing defect annealing based on ionization irradiation
  • Method for inducing defect annealing based on ionization irradiation
  • Method for inducing defect annealing based on ionization irradiation

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Experimental program
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specific Embodiment approach 1

[0019] Specific Embodiment 1: In this embodiment, a method for annealing induced displacement defects based on ionizing radiation is carried out according to the following steps:

[0020] 1. Measure the chip thickness a of the sample containing displacement defects, and the farthest distance b from the area containing displacement defects to the surface;

[0021] 2. Select the type of incident particles, and then use the Geant4 software to input the radiation source energy of the incident particles, calculate the incident depth d of the incident particles in the sample chip, and ensure that the input radiation source energy satisfies d>2a or d>4b;

[0022] 3. According to the energy of the radiation source in step 2, calculate the ionization absorbed dose Id and the displacement absorbed dose Dd of the incident particles per unit fluence in the sample through the Geant4 software;

[0023] According to the distribution of ionized absorbed dose Id and displacement absorbed dose ...

specific Embodiment approach 2

[0029] Embodiment 2: This embodiment is different from Embodiment 1 in that: the irradiated particles are electrons, protons, heavy ions, neutrons, photons or mesons. Others are the same as the first embodiment.

specific Embodiment approach 3

[0030] Embodiment 3: The difference between this embodiment and Embodiment 1 or 2 is that the sample is an MIS device or a bipolar device. Others are the same as those in Embodiment 1 or 2.

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Abstract

The invention relates to a method for inducing the defect annealing based on ionization irradiation, and aims at solving a problem that the particle radiation will cause the displacement damage to a device. The method comprises the steps: calculating the ionization / displacement absorbed dose and range of unit fluence incident particles based on a Monte Carlo computing method; determining the typeof incident particles according to the proportional relation between the ionization and the displacement absorbed dose and the features of a sample, thereby guaranteeing that the incident particles can promote the annealing of existing defect in the sample in a conveying process of the sample. The method is simple in steps, and is easy for operation. The method is used for the technical field of spatial environment effects, nuclear science and application technologies.

Description

technical field [0001] The invention relates to a method for annealing induced displacement defects based on ionizing radiation. Background technique [0002] Spacecraft orbiting in space will be affected by various environmental factors, such as particle radiation, microgravity, and atomic oxygen. With the rapid development of electronic technology, the application of electronic components is becoming more and more extensive. Electronic devices are widely used in satellites, spacecraft and space shuttles to achieve various functions. For electronic devices, particle radiation is the most lethal environmental factor. Early launches of spacecraft failed several times due to damage. With the development of science and technology, although there are fewer and fewer cases of fatal failures in spacecraft such as satellites, they still happen from time to time. Space particle radiation will shorten the working life of satellites, thus causing huge losses. Even if methods such...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/268H01L21/324
CPCH01L21/268H01L21/324
Inventor 李兴冀杨剑群刘超铭吕钢
Owner HARBIN INST OF TECH
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