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Carbon element injection method and modifying tool and mold thereof

A technology of carbon element and ion implantation equipment, which is applied in the direction of ion implantation plating, metal material coating process, vacuum evaporation plating, etc., and can solve the problems of high implantation cost and complicated implantation operation

Active Publication Date: 2018-07-31
SHENZHEN UNIV
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Problems solved by technology

However, the implantation cost of these two carbon element implantation methods is often high, especially when it involves dual ion implantation of carbon element and metal ions, it is necessary to replace the target on the metal ion implanter for implantation, or to allow the metal sample to be pulsed negatively. At the same time, the acetylene is in the state of arc ionization at the same time, so the injection operation is more complicated

Method used

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  • Carbon element injection method and modifying tool and mold thereof
  • Carbon element injection method and modifying tool and mold thereof
  • Carbon element injection method and modifying tool and mold thereof

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Embodiment Construction

[0027] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are some of the embodiments of the present invention, but not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0028] see figure 1 , figure 1 It is a schematic flow chart of the carbon element injection method in the embodiment of the present application. The carbon element implantation method is applied to ion implantation equipment. The ion implantation equipment includes a metal ion source, a vacuum chamber, a sample rack located in the vacuum chamber, and the like.

[0029] Such as figure 1 As shown, the carbon element implantation method includes ...

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Abstract

The invention discloses a carbon element injection method and a modifying tool and mold thereof. The carbon element injection method comprises the steps that a metal sample is put on a sample holder,and a preset metal target material is installed on a metal ion source; a vacuum chamber is vacuumized to the first preset vacuum degree; the metal ion source is preheated; acetylene is introduced intothe vacuum chamber to adjust the vacuum degree of the vacuum chamber to the second preset vacuum degree; and metal ion injection parameters are set, ion injection equipment is started, and carbon elements in acetylene are carried and injected into the metal sample by virtue of metal ions generated by the metal ion source. The carbon element injection method has the advantages of being low in injection cost, easy to operate and the like.

Description

technical field [0001] The invention relates to the technical field of ion implantation, in particular to a carbon element implantation method and modified cutters and molds thereof. Background technique [0002] Ion implantation technology is a physical process that ionizes atoms of a certain element to form positive ions, accelerates them in a high-voltage electric field, and injects them into the surface of solid materials after obtaining a high speed. It is mainly used to improve material properties, etc. aspect. For example, to inject carbon into a metal sample, the existing implantation method is to ionize the graphite target installed on the metal ion source to form carbon ions and then inject it into the metal sample, or let the metal sample applied with pulsed negative high voltage be attracted by the arc Carbon ions in ionized acetylene. However, the implantation cost of these two carbon element implantation methods is often high, especially when it involves dual...

Claims

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Application Information

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IPC IPC(8): C23C14/48
CPCC23C14/48
Inventor 王世兴苏红黄建军
Owner SHENZHEN UNIV
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