Piezoelectrically-driven precision rotation driving device using specially-shaped hinge transmission mechanism

Abstract

The invention relates to a piezoelectrically-driven precision rotation driving device using a specially-shaped hinge transmission mechanism, and belongs to the technical field of precision engineering. The piezoelectrically-driven precision rotation driving device using the specially-shaped hinge transmission mechanism comprises a base, a rotating table surface, a stator assembly, a bearing and other units, wherein the base and the rotating table surface are connected through the bearing; the base and the stator assembly are connected through bolts; the rotating table surface and the stator assembly are in contact fit through front ends of driving feet; the base and the rotating table surface are in interference fit with the bearing. When an excitation electric signal acts on a piezoelectric stack, the piezoelectric stack generates axial elongation based on an inverse piezoelectric effect, the driving feet generate tangential displacement to drive the rotating table surface to generateprecise rotating motion, and by changing the direction and the time sequence of driving voltage, the rotating table surface can be controlled to generate positive and reverse rotating motions and positioning can be achieved. The piezoelectrically-driven precision rotation driving device using the specially-shaped hinge transmission mechanism has many technical advantages such as simple structure, high positioning precision and high response speed, and has a wide application prospect in the technical field of precision engineering.

Description

technical field [0001] The invention relates to the technical field of precision engineering, in particular to a piezoelectric-driven precision rotary drive device using a special-shaped hinge transmission mechanism. Background technique [0002] In recent years, with the development of science and technology, micro-nano technology has become more and more important in life sciences, microelectronics, optics, ultra-precision machinery and its manufacturing, precision measurement, medicine and health, semiconductors, biochemistry, data storage and other disciplines. more important position. Micro-mechanical technology, micro-nano measurement technology, and micro-nano-level positioning and driving technology have become hot spots in the high-tech field in the world today. Various new driving devices with functions of precise driving, precise measurement and precise positioning have been successively developed. Existing driving devices often have shortcomings such as large s...

AI Technical Summary

Problems solved by technology

[0003] The purpose of the present invention is to provide a piezoelectric-driven precision rotary drive device using a special-shaped hinge transmission mechanism, which solves the technical problems of the existing technology such as large structural size, low positioning accuracy and small stroke.

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