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Light beam MEMS quick regulation and control system

A control system and fast technology, applied in the field of lasers, can solve problems affecting processing accuracy and other issues

Active Publication Date: 2018-06-15
XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Generally, according to the laser pulse standard, the laser pulse with a duration greater than 10 picoseconds (equivalent to the heat conduction time) is a long pulse, and it is used to process materials. Due to the thermal effect, the surrounding materials will change, thereby affecting the processing accuracy.

Method used

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  • Light beam MEMS quick regulation and control system
  • Light beam MEMS quick regulation and control system
  • Light beam MEMS quick regulation and control system

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Embodiment

[0015]In this embodiment, the MEMS quick adjustment mirror system 1 is composed of a plurality of single MEMS microlenses 2, the single MEMS microlens 2 can be rolled along the X and Y axes, and the microlens can be rolled along the X axis to adjust the input laser spot in the X direction. The movement of the microlens along the Y-axis direction and the rolling of the microlens along the Y-axis direction can adjust the movement of the input laser spot in the Y-axis direction. Therefore, the MEMS fast adjustment mirror system 1 can arbitrarily adjust the position of the laser spot in the two-dimensional plane formed by the XY axis. The MEMS fast adjustment mirror system 1 is located in the second space where the control system constitutes the core space of the control system, and the MEMS fast adjustment mirror system 1 has a coherent micro lens 2 formed by a single MEMS microlens 2 that can realize various ergodic processes. The lens matrix, the single MEMS microlens 2 has wave...

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Abstract

The invention relates to a regulation and control system. The regulation and control system is used for regulation and control of the amplitude of femto second laser pulse light beam, and includes a femto second laser pulse light source, an MEMS quick regulation mirror system, a light spot position sensor and a signal processing system. The regulation and control system is characterized in that the MEMS quick regulation mirror system is arranged in the regulation and control system to form the second space of the core space of the regulation and control system; the MEMS quick regulation mirrorsystem is provided with a coherent microlens matrix which is formed by single MEMS microlens being able to implement the ergodic process; the single MEMS microlens has insensitive attribute for wavenumber; the signal processing system controls the MEMS quick regulation mirror system to regulate and control the light beam amplitude; the MEMS quick regulation mirror system regulates the coherent microlens matrix through the information processing system parallel pulse signals; and each single MEMS microlens and the axial included angle in the coherent microlens matrix are controlled by the parallel pulse signal amplitude.

Description

technical field [0001] The invention belongs to the field of lasers and relates to a control system for femtosecond laser pulse beams. The system uses the MEMS fast adjustment mirror system to control the optical path of the femtosecond laser pulse. It has laser light source, MEMS fast adjustment mirror system, spot position sensor, signal processor and other units, which can reduce the spot jitter to one tenth of the spot size. . Background technique [0002] A new type of light source appeared in the 1960s, which has the characteristics of good monochromaticity, good directionality, good coherence, and energy concentration. A femtosecond light pulse is defined as a duration of 10 -12 s-10 -15 s laser pulse, this laser pulse has the characteristics of extremely high peak power, wide spectral width and extremely short laser emission time. With its unique ultra-short duration and ultra-strong peak power, the femtosecond laser has created a new field of ultra-fine material...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B26/08
CPCG02B26/0833
Inventor 李明姜澜李珣
Owner XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI
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